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Electromechanical transducers based on piezoelectric layers and thin films are continuously finding their way into micro-electromechanical systems (MEMS). Piezoelectric transducers feature a linear voltage response, no snap-in behavior and can provide both attractive and repulsive forces. This removes inherent physical limitations present in the commonly used electrostatic transducer approach, while maintaining beneficial properties such as low-power operation. In order to exploit the full potential of piezoelectric MEMS, interdisciplinary research efforts range from investigations of advanced piezoelectric materials over the design of novel piezoelectric MEMS sensor and actuator devices, to the integration of PiezoMEMS devices into full low-power systems. In this Special Issue, the current status of this exciting research field will be presented, covering a wide range of topics including, but not limited to: - Experimental and theoretical research on piezoelectric materials such as AlN, ScAlN, ZnO or PZT, PVDF with a strong focus on the application of MEMS devices. - Deposition and synthesis techniques for piezoelectric materials enabling integration of those materials into MEMS fabrication processes. - Modelling and simulation of piezoelectric MEMS devices and systems. - Piezoelectric MEMS resonators for measuring physical quantities such as mass, acceleration, yaw rate, pressure and viscosity or density of liquids. - Optical MEMS devices, such as scanning micro mirror devices and optical switches, based on piezoelectric MEMS. - Acoustic devices, such as SAW, BAW or FBARs and acoustic transducers, based on piezoelectric MEMS, such as microphones or loudspeakers. - Piezoelectric energy harvesting devices. - Specific packaging aspects of piezoelectric devices and systems. - Low and zero power systems, featuring low-power sensors combined with energy harvesting devices, at least one of which is based on piezoelectric MEMS.
Thin films. --- Piezoelectric transducers. --- Piezoelectric devices --- Transducers --- Films, Thin --- Solid film --- Solid state electronics --- Solids --- Surfaces (Technology) --- Coatings --- Thick films
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This book explores emerging methods and algorithms that enable precise control of micro-/nano-positioning systems. The text describes three control strategies: hysteresis-model-based feedforward control and hysteresis-model-free feedback control based on and free from state observation. Each paradigm receives dedicated attention within a particular part of the text. Readers are shown how to design, validate and apply a variety of new control approaches in micromanipulation: hysteresis modelling, discrete-time sliding-mode control and model-reference adaptive control. Experimental results are provided throughout and build up to a detailed treatment of practical applications in the fourth part of the book. The applications focus on control of piezoelectric grippers. Advanced Control of Piezoelectric Micro-/Nano-Positioning Systems will assist academic researchers and practising control and mechatronics engineers interested in suppressing sources of nonlinearity such as hysteresis and drift when combining position and force control of precision systems with piezoelectric actuation. Advances in Industrial Control aims to report and encourage the transfer of technology in control engineering. The rapid development of control technology has an impact on all areas of the control discipline. The series offers an opportunity for researchers to present an extended exposition of new work in all aspects of industrial control.
Mechanical Engineering - General --- Mechanical Engineering --- Engineering & Applied Sciences --- Automatic control. --- Piezoelectric devices --- Control engineering --- Control equipment --- Control theory --- Engineering instruments --- Automation --- Programmable controllers --- Dielectric devices --- Ferroelectric devices --- Engineering. --- Industrial engineering. --- Control and Systems Theory. --- Nanotechnology and Microengineering. --- Industrial and Production Engineering. --- Mechatronics. --- Management engineering --- Simplification in industry --- Engineering --- Value analysis (Cost control) --- Construction --- Industrial arts --- Technology --- Control engineering. --- Nanotechnology. --- Production engineering. --- Mechanical engineering --- Microelectronics --- Microelectromechanical systems --- Manufacturing engineering --- Process engineering --- Industrial engineering --- Molecular technology --- Nanoscale technology --- High technology
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This book provides comprehensive coverage of the materials characteristics, process technologies, and device operations for memory field-effect transistors employing inorganic or organic ferroelectric thin films. This transistor-type ferroelectric memory has interesting fundamental device physics and potentially large industrial impact. Among the various applications of ferroelectric thin films, the development of nonvolatile ferroelectric random access memory (FeRAM) has progressed most actively since the late 1980s and has achieved modest mass production levels for specific applications since 1995. There are two types of memory cells in ferroelectric nonvolatile memories. One is the capacitor-type FeRAM and the other is the field-effect transistor (FET)-type FeRAM. Although the FET-type FeRAM claims ultimate scalability and nondestructive readout characteristics, the capacitor-type FeRAMs have been the main interest for the major semiconductor memory companies, because the ferroelectric FET has fatal handicaps of cross-talk for random accessibility and short retention time. This book aims to provide readers with the development history, technical issues, fabrication methodologies, and promising applications of FET-type ferroelectric memory devices, presenting a comprehensive review of past, present, and future technologies. The topics discussed will lead to further advances in large-area electronics implemented on glass or plastic substrates as well as in conventional Si electronics. The book is composed of chapters written by leading researchers in ferroelectric materials and related device technologies, including oxide and organic ferroelectric thin films.
Physics. --- Surfaces (Physics). --- Interfaces (Physical sciences). --- Thin films. --- Electronic circuits. --- Electronics. --- Microelectronics. --- Materials --- Electronic Circuits and Devices. --- Electronics and Microelectronics, Instrumentation. --- Surfaces and Interfaces, Thin Films. --- Circuits and Systems. --- Surface and Interface Science, Thin Films. --- Surfaces. --- Ferroelectric devices. --- Ferroelectricity. --- Ferroelectric thin films. --- Ferroelectric effect --- Seignette-electricity --- Thin films --- Polarization (Electricity) --- Electronic apparatus and appliances --- Solid state electronics --- Piezoelectric devices --- Systems engineering. --- Engineering systems --- System engineering --- Engineering --- Industrial engineering --- System analysis --- Physics --- Surface chemistry --- Surfaces (Technology) --- Electrical engineering --- Physical sciences --- Design and construction --- Materials—Surfaces. --- Surfaces (Physics) --- Films, Thin --- Solid film --- Solids --- Coatings --- Thick films --- Microminiature electronic equipment --- Microminiaturization (Electronics) --- Electronics --- Microtechnology --- Semiconductors --- Miniature electronic equipment --- Electron-tube circuits --- Electric circuits --- Electron tubes
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This book addresses and analyzes the mechanisms responsible for functionality of two technologically relevant materials, giving emphasis on the relationship between structural transitions and electromechanical properties. The author investigates the atomic crystal structure and microstructure by means of thermal analysis, as well as diffraction and microscopy techniques. Electric field-, temperature- and frequency-dependent electromechanical properties are also described. Apart from this correlation between structure and properties, characterization was also performed to bridge between basic research and optimization of application-oriented parameters required for technological implementation. The author proposes guidelines to the reader in order to engineer functional properties in other piezoelectric systems, as well as in other similar functional materials with the perovskite structure.
Materials Science --- Chemical Engineering --- Chemical & Materials Engineering --- Engineering & Applied Sciences --- Ferroelectric devices. --- Strains and stresses. --- Lead-free electronics manufacturing processes. --- Architectural engineering --- Engineering, Architectural --- Stresses and strains --- Electronic apparatus and appliances --- Manufacturing processes --- Green electronics --- Architecture --- Elastic solids --- Flexure --- Mechanics --- Statics --- Structural analysis (Engineering) --- Deformations (Mechanics) --- Elasticity --- Engineering design --- Graphic statics --- Strength of materials --- Stress waves --- Structural design --- Solid state electronics --- Piezoelectric devices --- Design and construction --- Surfaces (Physics). --- Ceramics, Glass, Composites, Natural Materials. --- Characterization and Evaluation of Materials. --- Spectroscopy and Microscopy. --- Physics --- Surface chemistry --- Surfaces (Technology) --- Ceramics. --- Glass. --- Composites (Materials). --- Composite materials. --- Materials science. --- Spectroscopy. --- Microscopy. --- Analysis, Microscopic --- Light microscopy --- Micrographic analysis --- Microscope and microscopy --- Microscopic analysis --- Optical microscopy --- Optics --- Analysis, Spectrum --- Spectra --- Spectrochemical analysis --- Spectrochemistry --- Spectroscopy --- Chemistry, Analytic --- Interferometry --- Radiation --- Wave-motion, Theory of --- Absorption spectra --- Light --- Spectroscope --- Material science --- Physical sciences --- Composites (Materials) --- Multiphase materials --- Reinforced solids --- Solids, Reinforced --- Two phase materials --- Materials --- Amorphous substances --- Ceramics --- Glazing --- Ceramic technology --- Industrial ceramics --- Keramics --- Building materials --- Chemistry, Technical --- Clay --- Qualitative --- Spectrometry --- Analytical chemistry
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