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This thesis by Tuomas Hänninen explores the growth of amorphous silicon oxynitride (SiOxNy) thin films using reactive high power impulse magnetron sputtering (HiPIMS). The study focuses on how the elemental composition of these films is influenced by factors like target surface conditions and reactive gas flow rates. By examining different target surface conditions, the research identifies variations in the film's chemical composition, which range from silicon-rich to silicon oxynitrides. The work also investigates the optical properties of the films, such as refractive index and extinction coefficient, which depend on chemical bonding. The intended audience includes researchers and professionals in materials science, particularly those interested in thin film technology and its applications in optics and medical implants.
Thin films. --- Magnetron sputtering. --- Thin films --- Magnetron sputtering
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This thesis investigates the development of low friction and wear-resistant carbon nitride thin films for rolling components, particularly roller bearings, using various magnetron sputtering techniques. The research focuses on the synthesis of carbon nitride (CNx) thin films at low temperatures, exploring different sputtering methods like mid-frequency magnetron sputtering (MFMS), direct current magnetron sputtering (DCMS), and high power impulse magnetron sputtering (HiPIMS). The study examines how factors such as bias duty cycles, ion energy, and deposition techniques influence the mechanical properties, morphology, and tribological behavior of the films. The findings suggest that denser and homogeneous films exhibit superior wear resistance and mechanical strength, with the MFMS technique producing particularly promising results. The thesis is aimed at researchers and professionals in material science and engineering fields who are interested in advanced coatings for industrial applications.
Carbon nitride. --- Magnetron sputtering. --- Carbon nitride --- Magnetron sputtering
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