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This dissertation by Asim Aijaz explores the synthesis of carbon-based and metal-oxide thin films using high power impulse magnetron sputtering (HiPIMS). The work is divided into two parts, focusing on the deposition of carbon-based and metal-oxide thin films. For carbon-based films, strategies were developed to enhance the degree of carbon ionization and deposition rates. This includes using a higher ionization potential buffer gas and coupling HiPIMS with direct current magnetron sputtering (DCMS). For metal-oxide films, the study investigates reactive HiPIMS discharges for systems like Ti-O and Al-O, and their influence on film properties such as phase composition and optical characteristics. The dissertation targets researchers and professionals in the fields of material science and plasma physics, providing insights into advanced film deposition techniques and their applications.

Magnetron sputtering. --- Thin films.