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One of the critical issues in semiconductor technology is the precise electrical characterization of ultra-shallow junctions. Among the plethora of measurement techniques, the optical reflectance approach developed in this work is the sole concept that does not require physical contact, making it suitable for non-invasive in-line metrology. This work develops extensively all the fundamental physical models of the photomodulated optical reflectance technique and introduces novel approaches that extend its applicability from dose monitoring towards detailed carrier profile reconstruction. It represents a significant breakthrough in junction metrology with potential for industrial implementation.

Semiconductors -- Optical properties. --- Semiconductors -- Testing -- Optical methods. --- Semiconductors. --- Silicon -- Nondestructive testing. --- Physics --- Physical Sciences & Mathematics --- Electricity & Magnetism --- Reflectance. --- Light modulators. --- Modulators, Light --- Photomodulators --- Coefficient of reflection --- Radiant total reflectance --- Reflection coefficient --- Reflection factor --- Reflectivity (Optics) --- Total reflectance, Radiant --- Physics. --- Applied and Technical Physics. --- Modulators (Electronics) --- Optoelectronic devices --- Reflection (Optics) --- Natural philosophy --- Philosophy, Natural --- Physical sciences --- Dynamics --- Crystalline semiconductors --- Semi-conductors --- Semiconducting materials --- Semiconductor devices --- Crystals --- Electrical engineering --- Electronics --- Solid state electronics --- Materials