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Nanofabrication Using Focused Ion and Electron Beams presents fundamentals of the interaction of focused ion and electron beams (FIB/FEB) with surfaces, as well as numerous applications of these techniques for nanofabrication involving different materials and devices. The book begins by describing the historical evolution of FIB and FEB systems, applied first for micro- and more recently for nanofabrication and prototyping, practical solutions available in the market for different applications, and current trends in development of tools and their integration in a fast growing field of nanofabr

Nanostructured materials. --- Nanotechnology. --- Electron beams --- Ion bombardment --- Molecular technology --- Nanoscale technology --- High technology --- Nanomaterials --- Nanometer materials --- Nanophase materials --- Nanostructure controlled materials --- Nanostructure materials --- Ultra-fine microstructure materials --- Microstructure --- Nanotechnology --- Industrial applications.

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The main theme of this book is the interaction of electrons with electromagnetic waves in the presence of periodic and quasi-periodic structures in vacuum, in view of applications in the design and operation of particle accelerators. The first part of the book is concerned with the textbook-like presentation of the basic material, in particular reviewing elementary electromagnetic phenomena and electron dynamics. The second part of the book describes the current models for beam-wave interactions with periodic and quasi-periodic structures. This is the basis for introducing, in the last part of the book, a number of particle and radiation sources that rest on these principles, in particular the free-electron laser, wake-field acceleration schemes and a number of other advanced particle accelerator concepts. This second edition brings this fundamental text up-to-date in view of the enormous advances that have been made over the last decade since the first edition was published. All chapters, as well as the bibliography, have been significantly revised and extended, and the number of end-of-chapter exercises has been further increased to enhance this book’s usefulness for teaching specialized graduate courses. .

Electromagnetic waves. --- Electron beams. --- Lasers. --- Physics --- Physical Sciences & Mathematics --- Nuclear Physics --- Electromagnetic energy --- Electromagnetic radiation --- Beams, Electron --- Light amplification by stimulated emission of radiation --- Masers, Optical --- Optical masers --- Physics. --- Optics. --- Electrodynamics. --- Particle acceleration. --- Physical measurements. --- Measurement. --- Microwaves. --- Optical engineering. --- Particle Acceleration and Detection, Beam Physics. --- Optics and Electrodynamics. --- Microwaves, RF and Optical Engineering. --- Measurement Science and Instrumentation. --- Light amplifiers --- Light sources --- Optoelectronic devices --- Nonlinear optics --- Optical parametric oscillators --- Electromagnetic theory --- Waves --- Electron optics --- Electronics --- Particle beams --- Classical Electrodynamics. --- Hertzian waves --- Electric waves --- Electromagnetic waves --- Geomagnetic micropulsations --- Radio waves --- Shortwave radio --- Particles (Nuclear physics) --- Acceleration (Mechanics) --- Nuclear physics --- Acceleration --- Measurement   . --- Measuring --- Mensuration --- Mathematics --- Technology --- Metrology --- Physical measurements --- Measurements, Physical --- Mathematical physics --- Measurement --- Mechanical engineering --- Dynamics --- Light