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Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items. It pays particular attention to the measurement of surface forms of precision workpieces and to stage motions of precision machines. The first half of the book is dedicated to the description of optical sensors for the measurement of angle and displacement, which are fundamental quantities for precision nanometrology. The second half presents a number of scanning-type measuring systems for surface forms and stage motions. The systems discussed include: • error separation algorithms and systems for measurement of straightness and roundness, • the measurement of micro-aspherics, • systems based on scanning probe microscopy, and • scanning image-sensor systems. Precision Nanometrology presents the fundamental and practical technologies of precision nanometrology with a helpful selection of algorithms, instruments and experimental data. It will be beneficial for researchers, engineers and postgraduate students involved in precision engineering, nanotechnology and manufacturing. The Springer Series in Advanced Manufacturing publishes the best teaching and reference material to support students, educators and practitioners in manufacturing technology and management. This international series includes advanced textbooks, research monographs, edited works and conference proceedings covering all subjects in advanced manufacturing. The series focuses on new topics of interest, new treatments of more traditional areas and coverage of the applications of information and communication technology (ICT) in manufacturing.

Engineering. --- Nanostructured materials -- Measurement. --- Nanostructured materials. --- Nanomanufacturing --- Nanostructured materials --- Chemical & Materials Engineering --- Mechanical Engineering --- Engineering & Applied Sciences --- Materials Science --- Mechanical Engineering - General --- Measurement --- Nanoscience. --- Nano science --- Nanoscale science --- Nanosciences --- Surfaces (Physics). --- Interfaces (Physical sciences). --- Thin films. --- Physical measurements. --- Measurement. --- Nanotechnology. --- Control engineering. --- Robotics. --- Mechatronics. --- Manufacturing industries. --- Machines. --- Tools. --- Nanotechnology and Microengineering. --- Surface and Interface Science, Thin Films. --- Control, Robotics, Mechatronics. --- Manufacturing, Machines, Tools. --- Measurement Science and Instrumentation. --- Hand tools --- Handtools --- Hardware --- Implements, utensils, etc. --- Machinery --- Machines --- Manufactures --- Power (Mechanics) --- Technology --- Mechanical engineering --- Motors --- Power transmission --- Industries --- Microelectronics --- Microelectromechanical systems --- Automation --- Machine theory --- Control engineering --- Control equipment --- Control theory --- Engineering instruments --- Programmable controllers --- Molecular technology --- Nanoscale technology --- High technology --- Measuring --- Mensuration --- Mathematics --- Metrology --- Physical measurements --- Measurements, Physical --- Mathematical physics --- Films, Thin --- Solid film --- Solid state electronics --- Solids --- Surfaces (Technology) --- Coatings --- Thick films --- Surface chemistry --- Surfaces (Physics) --- Physics --- Construction --- Industrial arts --- Curious devices --- Science --- Manufactures. --- Manufacturing, Machines, Tools, Processes. --- Manufactured goods --- Manufactured products --- Products --- Products, Manufactured --- Commercial products --- Manufacturing industries --- Measurement   .