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Nanotechnology has reached a level where almost every new development and even every new product uses features of nanoscopic properties of materials. As a consequence, an enormous amount of scientific instruments is used in order to synthesize and analyze new structures and materials. Due to the surface sensitivity of such materials, many of these instruments require ultrahigh vacuum that has to be provided under extreme conditions like very high voltages. In this book, Yoshimura provides a review of the UHV related development during the last decades. His very broad experience in the design enables him to present us this detailed reference. After a general description how to design UHV systems, he covers all important issue in detail, like pumps, outgasing, Gauges, and Electrodes for high voltages. Thus, this book serves as reference for everybody using UVH in his scientific equipment.

Vacuum technology. --- Scientific apparatus and instruments. --- Apparatus, Scientific --- Instruments, Scientific --- Science --- Scientific instruments --- Research --- Industrial vacuum --- Vacuum --- Vacuum in industry --- Ultrahigh vacuum --- Instruments --- Equipment and supplies --- Industrial applications

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Nineteen experts from the electronics industry, research institutes and universities have joined forces to prepare this book. Vacuum Electronics covers the electrophysical fundamentals, the present state of the art and applications, as well as the future prospects of microwave tubes and systems, optoelectronics vacuum devices, electron and ion beam devices, light and X-ray emitters,particle accelerators and vacuum interrupters. These topics are supplemented by useful information about the materials and technologies of vacuum electronics and vacuum technology.

Microwave tubes. --- Vacuum microelectronics. --- Vacuum-tubes. --- Vacuum technology --- Electric discharges through gases --- Electron tubes --- X-rays --- Microelectronics --- Microwave devices --- Electronics. --- Optical materials. --- Engineering. --- Computer engineering. --- Electronics and Microelectronics, Instrumentation. --- Optical and Electronic Materials. --- Engineering, general. --- Electrical Engineering. --- Computers --- Construction --- Industrial arts --- Technology --- Optics --- Materials --- Electrical engineering --- Physical sciences --- Design and construction --- Microelectronics. --- Electronic materials. --- Electrical engineering. --- Electronic materials --- Microminiature electronic equipment --- Microminiaturization (Electronics) --- Electronics --- Microtechnology --- Semiconductors --- Miniature electronic equipment --- Electric engineering --- Engineering