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Many of the devices and systems used in modern industry are becoming progressively smaller and have reached the nanoscale domain. Nanofabrication aims at building nanoscale structures, which can act as components, devices, or systems, in large quantities at potentially low cost. Nanofabrication is vital to all nanotechnology fields, especially for the realization of nanotechnology that involves the traditional areas across engineering and science. This is the first book solely dedicated to the manufacturing technology in nanoscale structures, devices, and systems and is designed to satisfy th

Lithography, Electron beam. --- Nanostructured materials. --- Nanostructures. --- Scanning probe microscopy. --- Scanned probe microscopy --- Scanning electron microscopy --- Nanoscience --- Physics --- Electron beam lithography --- Electron beams --- Microelectronics --- Photolithography --- Nanomaterials --- Nanometer materials --- Nanophase materials --- Nanostructure controlled materials --- Nanostructure materials --- Ultra-fine microstructure materials --- Microstructure --- Nanotechnology --- Industrial applications