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The use of thin films is continuously expanding. In the family of Physical Vapour Deposition techniques, sputtering is one of the most important over the past 40 years. In this book, all aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth, are described in detail, allowing the reader to understand the complete process. Hence, this book gives necessary information for those who want to: - start with reactive magnetron sputtering - understand and investigate the technique - control their sputtering process - tune their existing process, obtaining the desired thin films.

Cathode sputtering (Plating process) --- Thin films. --- Films, Thin --- Solid film --- Solid state electronics --- Solids --- Surfaces (Technology) --- Coatings --- Thick films --- Ion plating --- Metallic films --- Sputtering (Physics) --- Vapor-plating --- Surfaces (Physics). --- Chemistry, Physical organic. --- Chemical engineering. --- Surfaces and Interfaces, Thin Films. --- Condensed Matter Physics. --- Physical Chemistry. --- Industrial Chemistry/Chemical Engineering. --- Chemistry, Industrial --- Engineering, Chemical --- Industrial chemistry --- Engineering --- Chemistry, Technical --- Metallurgy --- Chemistry, Physical organic --- Chemistry, Organic --- Chemistry, Physical and theoretical --- Physics --- Surface chemistry --- Materials—Surfaces. --- Condensed matter. --- Physical chemistry. --- Chemistry, Theoretical --- Physical chemistry --- Theoretical chemistry --- Chemistry --- Condensed materials --- Condensed media --- Condensed phase --- Materials, Condensed --- Media, Condensed --- Phase, Condensed --- Liquids --- Matter --- Cathode sputtering (Plating process).

Choose an application

• Reference Manager
• EndNote
• RefWorks (Direct export to RefWorks)

The use of thin films is continuously expanding. In the family of Physical Vapour Deposition techniques, sputtering is one of the most important over the past 40 years. In this book, all aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth, are described in detail, allowing the reader to understand the complete process. Hence, this book gives necessary information for those who want to: - start with reactive magnetron sputtering - understand and investigate the technique - control their sputtering process - tune their existing process, obtaining the desired thin films.