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This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer’s viewpoint as devices that transform an input form of energy, such as thermal, electrostatic, electromagnetic or optical, into output mechanical motion (in the case of actuation) or that can operate with the reversed functionality (as in sensors) and convert an external stimulus, such as mechanical motion, into (generally) electric energy. The impetus of this proposal stems from the perception that such an approach might contribute to a more solid understanding of the principles governing the mechanics of MEMS, and would hopefully enhance the efficiency of modeling and designing reliable and desirably-optimized microsystems. The work represents an attempt at both extending and deepening the mechanical-based approach to MEMS in the static domain by providing simple, yet reliable tools that are applicable to micromechanism design through current fabrication technologies. Lumped-parameter stiffness and compliance properties of flexible components are derived both analytically (as closed-form solutions) and as simplified (engineering) formulas. Also studied are the principal means of actuation/sensing and their integration into the overall microsystem. Various examples of MEMS are studied in order to better illustrate the presentation of the different modeling principles and algorithms. Through its objective, approach and scope, this book offers a novel and systematic insight into the MEMS domain and complements existing work in the literature addressing part of the material developed herein.

Microelectromechanical systems. --- MEMS (Microelectromechanical systems) --- Micro-electro-mechanical systems --- Micro-machinery --- Microelectromechanical devices --- Micromachinery --- Micromachines --- Micromechanical devices --- Micromechanical systems --- Electromechanical devices --- Microtechnology --- Mechatronics --- Mechanical engineering. --- Mechanical Engineering. --- Engineering, Mechanical --- Engineering --- Machinery --- Steam engineering

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Does MEMS technology offer advantages to your company's products? Will miniature machines on a chip solve your application objectives for ôsmaller, better, cheaper, and faster'ö If you are a product development engineer or manager, the decision to design a MEMS device implies having an application and market. This book offers you a practical guide to making this important business decision. Here, both veterans and newcomers to MEMS device design will get advice on evaluating MEMS for their business, followed by guidance on selecting solutions, technologies and design support tools. You will se

Microelectromechanical systems. --- Microelectromechanical systems --- Electrical & Computer Engineering --- Engineering & Applied Sciences --- Electrical Engineering --- MEMS (Microelectromechanical systems) --- Micro-electro-mechanical systems --- Micro-machinery --- Microelectromechanical devices --- Micromachinery --- Micromachines --- Micromechanical devices --- Micromechanical systems --- Electromechanical devices --- Microtechnology --- Mechatronics

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The book is focused on the use of functional oxide and nitride films to enlarge the application range of MEMS (microelectromechanical systems), including micro-sensors, micro-actuators, transducers, and electronic components for microwaves and optical communications systems. Applications, emerging applications, fabrication technology and functioning issues are presented and discussed. The book covers the following topics: Part A: Applications and devices with electroceramic-based MEMS: Chemical microsensors Microactuators based on thin films Micromachined ultrasonic transducers Thick-film piezoelectric and magnetostrictive devices Pyroelectric microsystems RF bulk acoustic wave resonators and filters High frequency tunable devices MEMS for optical functionality Part B: Materials, fabrication technology, and functionality: Ceramic thick films for MEMS Piezoelectric thin films for MEMS Materials and technology in thin films for tunable high frequency devices Permittivity, tunability and loss in ferroelectrics for reconfigurable high frequency electronics Microfabrication of piezoelectric MEMS Nano patterning methods for electroceramics Soft lithography emerging techniques The book is addressed to engineers, scientists and researchers of various disciplines, device engineers, materials engineers, chemists, physicists and microtechnologists who are working and/or interested in this fast growing and highly promising field. The publication of this book follows a Special Issue on electroceramic-based MEMS that was published in the Journal of Electroceramics at the beginning of 2004. The ten invited papers of that special issue were adapted by the authors into chapters of the present book and five additional chapters were added.

Microelectromechanical systems. --- Electromechanical devices. --- Electric-mechanical devices --- Electromechanical components --- Electrical engineering --- Mechanical engineering --- MEMS (Microelectromechanical systems) --- Micro-electro-mechanical systems --- Micro-machinery --- Microelectromechanical devices --- Micromachinery --- Micromachines --- Micromechanical devices --- Micromechanical systems --- Electromechanical devices --- Microtechnology --- Mechatronics --- Equipment and supplies --- Nanotechnology. --- Optical materials. --- Electronics. --- Surfaces (Physics). --- Ceramics, Glass, Composites, Natural Materials. --- Optical and Electronic Materials. --- Electronics and Microelectronics, Instrumentation. --- Characterization and Evaluation of Materials. --- Physics --- Surface chemistry --- Surfaces (Technology) --- Physical sciences --- Optics --- Materials --- Molecular technology --- Nanoscale technology --- High technology --- Ceramics. --- Glass. --- Composites (Materials). --- Composite materials. --- Electronic materials. --- Microelectronics. --- Materials science. --- Amorphous substances --- Ceramics --- Glazing --- Ceramic technology --- Industrial ceramics --- Keramics --- Building materials --- Chemistry, Technical --- Clay --- Material science --- Microminiature electronic equipment --- Microminiaturization (Electronics) --- Electronics --- Semiconductors --- Miniature electronic equipment --- Electronic materials --- Composites (Materials) --- Multiphase materials --- Reinforced solids --- Solids, Reinforced --- Two phase materials

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This book, "Integrated Chemical Microsensor Systems in CMOS Technology", provides a comprehensive treatment of the highly interdisciplinary field of CMOS chemical microsensor systems. It is targeted at students, scientists and engineers who are interested in gaining an introduction to the field of chemical sensing since all the necessary fundamental knowledge is included. However, as it provides detailed information on all important issues related to the realization of chemical microsensors in CMOS technology, it also addresses experts well familiar with the field. After a brief introduction, the fundamentals of chemical sensing are presented. Fabrication and processing steps that are commonly used in the semiconductor industry are then detailed followed by a short description of the microfabrication techniques, and of the CMOS substrate and materials. Thereafter, a comprehensive overview of semiconductor-based and CMOS-based transducer structures for chemical sensors is given. CMOS-technology is then introduced as platform technology, which enables the integration of these microtransducers with the necessary driving and signal conditioning circuitry on the same chip. In a next section, the development of monolithic multisensor arrays and fully developed microsystems with on-chip sensor control and standard interfaces is described. A short section on packaging shows that techniques from the semiconductor industry can be applied to chemical microsensor packaging. The book concludes with a brief outlook on future developments, such as the realization of more complex integrated microsensor systems and methods to interface biological materials, such as cells, with CMOS microelectronics.

Metal oxide semiconductors, Complementary. --- Microelectromechanical systems. --- Sensorimotor integration. --- Integration, Sensorimotor --- Intersensory integration --- Perceptual-motor integration --- Sensimotor integration --- Sensory integration --- Sensory-motor integration --- Perceptual-motor processes --- Sensory integration dysfunction --- MEMS (Microelectromechanical systems) --- Micro-electro-mechanical systems --- Micro-machinery --- Microelectromechanical devices --- Micromachinery --- Micromachines --- Micromechanical devices --- Micromechanical systems --- Electromechanical devices --- Microtechnology --- Mechatronics --- CMOS (Electronics) --- Complementary metal oxide semiconductors --- Semiconductors, Complementary metal oxide --- Digital electronics --- Logic circuits --- Transistor-transistor logic circuits --- Nanotechnology. --- Analytical biochemistry. --- Optical materials. --- Surfaces (Physics). --- Electronics. --- Analytical Chemistry. --- Optical and Electronic Materials. --- Surfaces and Interfaces, Thin Films. --- Measurement Science and Instrumentation. --- Electronics and Microelectronics, Instrumentation. --- Electrical engineering --- Physical sciences --- Physics --- Surface chemistry --- Surfaces (Technology) --- Optics --- Materials --- Analytic biochemistry --- Biochemistry --- Chemistry, Analytic --- Molecular technology --- Nanoscale technology --- High technology --- Bioanalytic chemistry --- Bioanalytical chemistry --- Analytical chemistry --- Analytical chemistry. --- Electronic materials. --- Materials—Surfaces. --- Thin films. --- Physical measurements. --- Measurement   . --- Microelectronics. --- Measurements, Physical --- Mathematical physics --- Measurement --- Films, Thin --- Solid film --- Solid state electronics --- Solids --- Coatings --- Thick films --- Electronic materials --- Analysis, Chemical --- Analytic chemistry --- Chemical analysis --- Chemistry --- Microminiature electronic equipment --- Microminiaturization (Electronics) --- Electronics --- Semiconductors --- Miniature electronic equipment --- Measuring --- Mensuration --- Mathematics --- Technology --- Metrology --- Physical measurements