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This five-volume handbook focuses on processing techniques, characterization methods, and physical properties of thin films (thin layers of insulating, conducting, or semiconductor material). The editor has composed five separate, thematic volumes on thin films of metals, semimetals, glasses, ceramics, alloys, organics, diamonds, graphites, porous materials, noncrystalline solids, supramolecules, polymers, copolymers, biopolymers, composites, blends, activated carbons, intermetallics, chalcogenides, dyes, pigments, nanostructured materials, biomaterials, inorganic/polymer composites, organocer
Thin films --- Films, Thin --- Solid film --- Solid state electronics --- Solids --- Surfaces (Technology) --- Coatings --- Thick films
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An up-to-date collection of tutorial papers on the latest advances in the deposition and growth of thin films for micro and nano technologies. The emphasis is on fundamental aspects, principles and applications of deposition techniques used for the fabrication of micro and nano devices. The deposition of thin films is described, emphasising the gas phase and surface chemistry and its effects on the growth rates and properties of films. Gas-phase phenomena, surface chemistry, growth mechanisms and the modelling of deposition processes are thoroughly described and discussed to provide a clear understanding of the growth of thin films and microstructures via thermally activated, laser induced, photon assisted, ion beam assisted, and plasma enhanced vapour deposition processes. A handbook for engineers and scientists and an introduction for students of microelectronics.
Thin films --- Nanotechnology --- Couches minces --- Nanotechnologie --- Congresses. --- Congrès --- Congrès --- Materials—Surfaces. --- Thin films. --- Physical chemistry. --- Chemical engineering. --- Surfaces and Interfaces, Thin Films. --- Physical Chemistry. --- Industrial Chemistry/Chemical Engineering. --- Chemistry, Industrial --- Engineering, Chemical --- Industrial chemistry --- Engineering --- Chemistry, Technical --- Metallurgy --- Chemistry, Theoretical --- Physical chemistry --- Theoretical chemistry --- Chemistry --- Films, Thin --- Solid film --- Solid state electronics --- Solids --- Surfaces (Technology) --- Coatings --- Thick films
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The Handbook of Thin Film Deposition Techniques: Principles, Methods, Equipment and Applications, Second Edition explores the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition techniques and the development of highly specialized equipment to enable this deposition.This second edition explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of submicron dimensions. The book covers PVD, laser and E-beam assisted deposition, MBE, and ion beam methods to bring together all of the physical vapor deposition techniques. The book also includes coverage of chemical mechanical polishing that helps attain the flatness that is required by modern lithography methods and new materials used for interconnect dielectric materials, specifically organic polyimide materials.
Chemical vapor deposition --- Thin film devices --- Thin films --- Films, Thin --- Solid film --- Solid state electronics --- Solids --- Surfaces (Technology) --- Coatings --- Thick films --- Devices, Thin film --- Electronic apparatus and appliances --- CVD (Chemical vapor deposition) --- Deposition, Chemical vapor --- Vapor deposition, Chemical --- Vapor-plating --- Design and construction --- Engineering --- Electronics
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Since 1995, the noncontact atomic force microscope (NC-AFM) has achieved remarkable progress. Based on nanomechanical methods, the NC-AFM detects the weak attractive force between the tip of a cantilever and a sample surface. This method has the following characteristics: it has true atomic resolution; it can measure atomic force interactions, i.e. it can be used in so-called atomic force spectroscopy (AFS); it can also be used to study insulators; and it can measure mechanical responses such as elastic deformation. This is the first book that deals with all of the emerging NC-AFM issues.
Experimental solid state physics --- Atomic force microscopy --- AFM (Microscopy) --- Scanning probe microscopy --- Nanotechnology. --- Materials—Surfaces. --- Thin films. --- Physical measurements. --- Measurement . --- Materials science. --- Surfaces and Interfaces, Thin Films. --- Measurement Science and Instrumentation. --- Characterization and Evaluation of Materials. --- Material science --- Physical sciences --- Measuring --- Mensuration --- Mathematics --- Technology --- Metrology --- Physical measurements --- Measurements, Physical --- Mathematical physics --- Measurement --- Films, Thin --- Solid film --- Solid state electronics --- Solids --- Surfaces (Technology) --- Coatings --- Thick films --- Molecular technology --- Nanoscale technology --- High technology
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A compendium representing the current state of the art in the modelling, simulation and physics of the interaction of hydrogen and helium with plasma facing materials in fusion reactors. This is the topic that will determine the success of the production of energy by future Tokamak reactors and it is here discussed by the world's experts. Topics covered are recycling of hydrogen isotopes; wall fuelling and wall pumping; active control of hydrogen recycling; hydrogen and helium behaviour in solids and liquid metals; and databases for recycling.
Plasma (Ionized gases) --- Hydrogen --- Helium --- Fusion reactors --- Physics --- Physical Sciences & Mathematics --- Electricity & Magnetism --- Isotopes --- Plasma (Gaz ionisés) --- Hydrogène --- Hélium --- Réacteurs à fusion --- Congresses --- Congresses. --- Congrès --- Monograph --- Materials—Surfaces. --- Thin films. --- Physical chemistry. --- Mathematical physics. --- Chemometrics. --- Surfaces and Interfaces, Thin Films. --- Physical Chemistry. --- Theoretical, Mathematical and Computational Physics. --- Math. Applications in Chemistry. --- Films, Thin --- Solid film --- Solid state electronics --- Solids --- Surfaces (Technology) --- Coatings --- Thick films --- Chemistry, Analytic --- Analytical chemistry --- Chemistry --- Chemistry, Theoretical --- Physical chemistry --- Theoretical chemistry --- Physical mathematics --- Mathematics --- Measurement --- Statistical methods
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When a photon meets a nanostructure, many interesting phenomena occur. This book aims at developing the theories and the applications of photon interactions with nanostructures. The contributors were all participants in the well-known Japanese national research project, "Near-Field Nano-Optics", which ran from 1997 to 2000. The book covers a wide range of disciplines in nano-optics, including the theoretical development of imaging-contrast mechanisms as a result of photon and nanomatter interactions, and discussions on different near-field nanoprobes. Applications of nano-optics to sensing, imaging, analysis, and the fabrication of nanostructures, such as molecules and quantum devices, are also discussed, with a collection of experimental examples.
Nanostructured materials --- Near-field microscopy --- Quantum optics --- Photonics --- Nanomatériaux --- Microscopie en champ proche --- Optique quantique --- Photonique --- Nanostructured materials. --- Near-field microscopy. --- Quantum optics. --- Photonics. --- Nanomatériaux --- Lasers. --- Materials—Surfaces. --- Thin films. --- Materials science. --- Nanotechnology. --- Optics, Lasers, Photonics, Optical Devices. --- Surfaces and Interfaces, Thin Films. --- Characterization and Evaluation of Materials. --- Molecular technology --- Nanoscale technology --- High technology --- Material science --- Physical sciences --- Films, Thin --- Solid film --- Solid state electronics --- Solids --- Surfaces (Technology) --- Coatings --- Thick films --- New optics --- Optics --- Light amplification by stimulated emission of radiation --- Masers, Optical --- Optical masers --- Light amplifiers --- Light sources --- Optoelectronic devices --- Nonlinear optics --- Optical parametric oscillators
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In the modern semiconductor industry, there is a growing need to understand and combat potential radiation damage problems. Space applications are an obvious case, but, beyond that, today's device and circuit fabrication rely on increasing numbers of processing steps that involve an aggressive environment where inadvertant radiation damage can occur. This book is both aimed at post-graduate researchers seeking an overview of the field, and will also be immensely useful for nuclear and space engineers and even process engineers. A background knowledge of semiconductor and device physics is assumed, but the basic concepts are all briefly summarized. Finally the book outlines the shortcomings of present experimental and modeling techniques and gives an outlook on future developments.
Semiconductors --- Effect of radiation on. --- -Crystalline semiconductors --- Semi-conductors --- Semiconducting materials --- Semiconductor devices --- Crystals --- Electrical engineering --- Electronics --- Solid state electronics --- Effect of radiation on --- Materials --- -Effect of radiation on --- Semiconductors, Effect of radiation on --- Crystallography. --- Energy policy. --- Energy and state. --- Optics. --- Electrodynamics. --- Materials science. --- Optical materials. --- Electronic materials. --- Materials—Surfaces. --- Thin films. --- Crystallography and Scattering Methods. --- Energy Policy, Economics and Management. --- Classical Electrodynamics. --- Characterization and Evaluation of Materials. --- Optical and Electronic Materials. --- Surfaces and Interfaces, Thin Films. --- Films, Thin --- Solid film --- Solids --- Surfaces (Technology) --- Coatings --- Thick films --- Electronic materials --- Optics --- Material science --- Physical sciences --- Dynamics --- Physics --- Light --- Energy and state --- Power resources --- State and energy --- Industrial policy --- Energy conservation --- Leptology --- Mineralogy --- Government policy
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