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Handbook of thin film materials
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ISBN: 9780125129084 0125129084 9780080533247 0080533248 9786612284953 1282284959 0125129092 9780125129091 0125129106 9780125129107 0125129114 9780125129114 0125129122 9780125129121 0125129130 9780125129138 Year: 2002 Publisher: San Diego : Academic Press,

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This five-volume handbook focuses on processing techniques, characterization methods, and physical properties of thin films (thin layers of insulating, conducting, or semiconductor material). The editor has composed five separate, thematic volumes on thin films of metals, semimetals, glasses, ceramics, alloys, organics, diamonds, graphites, porous materials, noncrystalline solids, supramolecules, polymers, copolymers, biopolymers, composites, blends, activated carbons, intermetallics, chalcogenides, dyes, pigments, nanostructured materials, biomaterials, inorganic/polymer composites, organocer

Chemical physics of thin film deposition processes for micro-and nano-technologies : proceedings of the NATO Advanced Study Institute on ..., Kaunas, Lithuania, 3-14 September 2001
Authors: --- --- ---
ISBN: 1402005245 1402005253 940100353X Year: 2002 Volume: v. 55 Publisher: Dordrecht ; Boston ; London Brussels Kluwer Academic Publishers NATO Scientific Affairs Division

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An up-to-date collection of tutorial papers on the latest advances in the deposition and growth of thin films for micro and nano technologies. The emphasis is on fundamental aspects, principles and applications of deposition techniques used for the fabrication of micro and nano devices. The deposition of thin films is described, emphasising the gas phase and surface chemistry and its effects on the growth rates and properties of films. Gas-phase phenomena, surface chemistry, growth mechanisms and the modelling of deposition processes are thoroughly described and discussed to provide a clear understanding of the growth of thin films and microstructures via thermally activated, laser induced, photon assisted, ion beam assisted, and plasma enhanced vapour deposition processes. A handbook for engineers and scientists and an introduction for students of microelectronics.

Handbook of thin-film deposition processes and techniques : principles, methods, equipment and applications
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ISBN: 0815514425 0429076746 1482269686 9786612253188 9786612253195 0815517785 1282253190 1591241936 9781591241935 9780815517788 9780815517764 0815517769 9780815514428 9780429076749 9781482269680 9781282253193 6612253193 6612253185 Year: 2002 Publisher: Norwich Noyes publications

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The Handbook of Thin Film Deposition Techniques: Principles, Methods, Equipment and Applications, Second Edition explores the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition techniques and the development of highly specialized equipment to enable this deposition.This second edition explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of submicron dimensions. The book covers PVD, laser and E-beam assisted deposition, MBE, and ion beam methods to bring together all of the physical vapor deposition techniques. The book also includes coverage of chemical mechanical polishing that helps attain the flatness that is required by modern lithography methods and new materials used for interconnect dielectric materials, specifically organic polyimide materials.

Noncontact atomic force microscopy
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ISBN: 3540431179 3642627722 3642560199 9783540431176 Year: 2002 Publisher: Berlin Springer

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Since 1995, the noncontact atomic force microscope (NC-AFM) has achieved remarkable progress. Based on nanomechanical methods, the NC-AFM detects the weak attractive force between the tip of a cantilever and a sample surface. This method has the following characteristics: it has true atomic resolution; it can measure atomic force interactions, i.e. it can be used in so-called atomic force spectroscopy (AFS); it can also be used to study insulators; and it can measure mechanical responses such as elastic deformation. This is the first book that deals with all of the emerging NC-AFM issues.

Hydrogen and helium recycling at plasma facing materials : proceedings of the NATO Advanced Research Workshop on ..., Argonne, Illinois, U.S.A., 22-24 August 2001
Authors: --- --- ---
ISBN: 9401004447 1402005121 1402005113 Year: 2002 Volume: v. 54 Publisher: Dordrecht ; Boston ; London Brussels Kluwer Academic Publishers NATO Scientific Affairs Division

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A compendium representing the current state of the art in the modelling, simulation and physics of the interaction of hydrogen and helium with plasma facing materials in fusion reactors. This is the topic that will determine the success of the production of energy by future Tokamak reactors and it is here discussed by the world's experts. Topics covered are recycling of hydrogen isotopes; wall fuelling and wall pumping; active control of hydrogen recycling; hydrogen and helium behaviour in solids and liquid metals; and databases for recycling.

Nano-optics
Authors: --- ---
ISBN: 3540418296 3642075274 3540452737 9783540418290 Year: 2002 Volume: 84 Publisher: Berlin ; New York : Springer,

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When a photon meets a nanostructure, many interesting phenomena occur. This book aims at developing the theories and the applications of photon interactions with nanostructures. The contributors were all participants in the well-known Japanese national research project, "Near-Field Nano-Optics", which ran from 1997 to 2000. The book covers a wide range of disciplines in nano-optics, including the theoretical development of imaging-contrast mechanisms as a result of photon and nanomatter interactions, and discussions on different near-field nanoprobes. Applications of nano-optics to sensing, imaging, analysis, and the fabrication of nanostructures, such as molecules and quantum devices, are also discussed, with a collection of experimental examples.

Radiation effects in advanced semiconductor materials and devices.
Authors: ---
ISBN: 3540433937 3642077781 3662049740 Year: 2002 Publisher: Berlin Springer

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In the modern semiconductor industry, there is a growing need to understand and combat potential radiation damage problems. Space applications are an obvious case, but, beyond that, today's device and circuit fabrication rely on increasing numbers of processing steps that involve an aggressive environment where inadvertant radiation damage can occur. This book is both aimed at post-graduate researchers seeking an overview of the field, and will also be immensely useful for nuclear and space engineers and even process engineers. A background knowledge of semiconductor and device physics is assumed, but the basic concepts are all briefly summarized. Finally the book outlines the shortcomings of present experimental and modeling techniques and gives an outlook on future developments.

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