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Micromachined transducers : sourcebook
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Author: Kovacs, Gregory T. A.
ISBN: 0071164626 Year: 2000 Publisher: New York, NY : McGraw-Hill,
ISBN: 0071164626 Year: 2000 Publisher: New York, NY : McGraw-Hill,
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Abstract
Keywords
Capteurs --- Micromecanique --- Microsystemes
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