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book (2)

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1990 (2)

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Electron beam induced damage in PECVD Si₃N₄ and SiO₂ films on InP
Authors: Pantic, Dragan M. --- Lewis Research Center
Year: 1990 Publisher: Cleveland, Ohio : National Aeronautics and Space Administration, Lewis Research Center,

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Capacitance-voltage characteristics. --- Electron beams. --- Indium phosphides. --- Irradiation. --- Phosphorus. --- Plasmas (physics) --- Radiation damage. --- Vapor deposition.

Beam-solid interactions : physical phenomena
Author: Knapp, James A.
ISBN: 1558990453 Year: 1990 Publisher: Pittsburgh Materials research society

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Electron beams --- Ion bombardment --- Laser beams --- Materials --- Semiconductors --- Congresses --- Congresses --- Congresses --- Effect of radiation on --- Congresses --- Effect of radiation on --- Congresses

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