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Plasma processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.
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Authors:
Coburn, J.W.
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Gottscho, R.A
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Hess, Dennis W.
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Materials Research Society
ISBN: 0931837340 Year: 1986 Volume: 68 Publisher: Pittsburgh, Pa. : Materials Research Society,
ISBN: 0931837340 Year: 1986 Volume: 68 Publisher: Pittsburgh, Pa. : Materials Research Society,
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Abstract
Keywords
Plasma engineering --- Plasmas, Technique des --- Congresses --- Congrès --- -Engineering --- Plasma (Ionized gases) --- -Congresses --- Congrès
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