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Ion implantation --- Semiconductor doping --- 538.9 --- Doping of semiconductors --- Diffusion --- Doped semiconductors --- Semiconductors --- Implantation, Ion --- Ion bombardment --- Ion plating --- Physics of condensed matter (in liquid state and solid state) --- Defects --- 538.9 Physics of condensed matter (in liquid state and solid state) --- Ion implantation. --- Semiconductor doping. --- Ions --- Semiconducteurs --- Implantation --- Dopage