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Smart sensors and MEMS can include a variety of devices and systems that have a high level of functionality. They do this either by integrating multiple sensing and actuating modes into one device, or else by integrating sensing and actuating with information processing, analog-to-digital conversion and memory functions.Part one outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, adva

Detectors -- Congresses. --- Detectors. --- Microelectromechanical systems -- Congresses. --- Microelectromechanical systems. --- Scanning systems -- Congresses. --- Scanning systems. --- Detectors --- Microelectromechanical systems --- Mechanical Engineering --- Engineering & Applied Sciences --- Industrial & Management Engineering --- Industrial applications --- Industrial applications. --- MEMS (Microelectromechanical systems) --- Micro-electro-mechanical systems --- Micro-machinery --- Microelectromechanical devices --- Micromachinery --- Micromachines --- Micromechanical devices --- Micromechanical systems --- Electromechanical devices --- Microtechnology --- Mechatronics --- Sensors --- Engineering instruments --- Physical instruments

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535 <063> --- Photon detectors --- -Radio astronomy --- -Radio astrophysics --- -Space astronomy --- -Space interferometry --- -#TWER:WTCM --- Astrophysics --- Interferometry --- Astronautics in astronomy --- Astronomy --- Space sciences --- Radio astronomy --- Radioastronomy --- Interstellar communication --- Counters, Photon --- Detectors, Photon --- Photon counters --- Nuclear counters --- 535 <063> Optics--Congressen --- Optics--Congressen --- Congresses --- Space astronomy --- Space interferometry --- Radio astrophysics --- #TWER:WTCM --- Congresses. --- Space astronomy - Congresses. --- Photon detectors - Congresses. --- Space interferometry - Congresses. --- Radio astronomy - Congresses. --- Radio astrophysics - Congresses. --- 629.78 --- Spaceflight engineering. Astronautics. Spacecraft