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ISBN: 9780819410191 0819410195 Year: 1993 Publisher: Bellingham (Wash.): International society for optical engineering,
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ISBN: 0841228485 9780841228481 Year: 1994 Publisher: New York (N.Y.): American chemical society,
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Microlithography --- Photoresists --- Plasma etching --- Semiconductors
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ISBN: 0841208239 9780841208230 Year: 1984 Volume: 242 Publisher: Washington (D.C.): American chemical society,
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Polymers --- -Polymere --- Polymeride --- Polymers and polymerization --- Macromolecules --- Congresses --- Electronics --- Materials --- Materials&delete& --- Electrical engineering --- Physical sciences --- Electronics - Materials - Congresses --- POLYMERS --- PHOTORESISTS --- POLYIMIDES --- PRINTED CIRCUITS --- ELECTRON BEAM RESISTS --- ENCAPSULATION --- CONDUCTING POLYMERS --- USES
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