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Electronics --- Transducers --- Electric gages --- Transducteurs --- 681.58 --- Gages --- Electric apparatus and appliances --- Electromechanical devices --- Electronic apparatus and appliances --- Components of automatic control systems. Servocomponents --- 681.58 Components of automatic control systems. Servocomponents --- Appareils électriques --- Électromagnétisme --- Appareils électriques --- Électromagnétisme --- Electroacoustique --- Mesures et instrumentation

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Mechanical engineering --- Nanotechnology --- Génie mécanique --- Nanotechnologie --- Mechanical engineering. --- Nanotechnology. --- 681.58-181.48 --- Molecular technology --- Nanoscale technology --- High technology --- Engineering, Mechanical --- Engineering --- Machinery --- Steam engineering --- Microsysteemtechnologie --- Génie mécanique

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Transducers --- Interface circuits --- 681.58 --- LF --- technieken --- transductors --- 681.33 --- 681.5 --- 681.586.6 --- Analoge systemen --- Signaalverwerking --- Thermische transducers --- 681.586 --- Meet- en regeltechniek : transducers --- analoge techniek (analoge elektronica) --- gpib (general purpose interface bus) --- transductor --- Circuits, Interface --- Electronic circuits --- Logic circuits --- Electric apparatus and appliances --- Electromechanical devices --- Electronic apparatus and appliances --- Components of automatic control systems. Servocomponents --- Interface circuits. --- Transducers. --- 681.58 Components of automatic control systems. Servocomponents --- Transducteurs --- Circuits d'interface --- ? --- meettechnieken --- Transducteurs. --- Circuits d'interface. --- Actuatoren, Sensortehnologie.

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It is a real pleasure to write the Foreword for this book, both because I have known and respected its author for many years and because I expect this book’s publication will mark an important milestone in the continuing worldwide development of microsystems. By bringing together all aspects of microsystem design, it can be expected to facilitate the training of not only a new generation of engineers, but perhaps a whole new type of engineer – one capable of addressing the complex range of problems involved in reducing entire systems to the micro- and nano-domains. This book breaks down disciplinary barriers to set the stage for systems we do not even dream of today. Microsystems have a long history, dating back to the earliest days of mic- electronics. While integrated circuits developed in the early 1960s, a number of laboratories worked to use the same technology base to form integrated sensors. The idea was to reduce cost and perhaps put the sensors and circuits together on the same chip. By the late-60s, integrated MOS-photodiode arrays had been developed for visible imaging, and silicon etching was being used to create thin diaphragms that could convert pressure into an electrical signal. By 1970, selective anisotropic etching was being used for diaphragm formation, retaining a thick silicon rim to absorb package-induced stresses. Impurity- and electrochemically-based etch-stops soon emerged, and "bulk micromachining" came into its own.

681.58-181.48 --- Microelectromechanical systems --- -Microelectronics --- System design --- Design, System --- Systems design --- Microminiature electronic equipment --- Microminiaturization (Electronics) --- MEMS (Microelectromechanical systems) --- Micro-electro-mechanical systems --- Micro-machinery --- Microelectromechanical devices --- Micromachinery --- Micromachines --- Micromechanical devices --- Micromechanical systems --- Microsysteemtechnologie --- Design and construction --- Microélectronique --- Mechatronics --- Microelectronics. --- Microélectronique --- Engineering. --- Mechanics. --- Electrical engineering. --- Optical materials. --- Electronic materials. --- Electrical Engineering. --- Optical and Electronic Materials. --- System design. --- Design and construction. --- System Design --- Microelectronics --- Electronic data processing --- System analysis --- Electronics --- Microtechnology --- Semiconductors --- Miniature electronic equipment --- Electromechanical devices --- Systèmes, Conception de --- Conception et construction --- EPUB-LIV-FT SPRINGER-B --- Computer engineering. --- Classical Mechanics. --- Classical mechanics --- Newtonian mechanics --- Physics --- Dynamics --- Quantum theory --- Electronic materials --- Optics --- Materials --- Electric engineering --- Engineering --- Microelectromechanical systems - Design and construction --- Microelectromechanical systems-design construction