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Book
Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films : Material Development and Applications in Microdevices
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Year: 2023 Publisher: Basel, Switzerland : MDPI - Multidisciplinary Digital Publishing Institute,

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Abstract

Recently, aluminium scandium nitride (AlScN) emerged as a material with superior properties compared to aluminium nitride (AlN). Substituting Al with Sc in AlN leads to a dramatic increase in the piezoelectric coefficient as well as in electromechanical coupling. This discovery finally allowed us to overcome the limitations of AlN thin films in various piezoelectric applications while still enabling us to benefit from all of the advantages of the parent material system, such as a high temperature stability, CMOS compatibility, and good mechanical properties. Potential applications include RF filters (bulk acoustic wave (BAW) or surface acoustic wave (SAW) resonators), energy harvesting, sensing applications, and infra-red detectors. The recent progress in MOCVD- and MBE-grown AlScN has led to high-frequency and -power electronics, (high-electron-mobility transistors (HEMTs)). AlScN is the first wurtzite III-nitride where ferroelectric switching was observed, allowing for many new possible applications in semiconductor memories additionally, it enables the additional functionality of switching to applications where piezoelectric materials are already in use. This Special Issue was very successful in covering all of the main aspects of AlScN research, including its growth, the fundamental and application-relevant properties, and device fabrication and characterization. We can see that AlScN technology is mature enough to be utilized in wafer-level material development and complicated devices, but there is still much to discover in terms of deposition process control, anisotropy, and, in particular, ferroelectric behavior.


Book
Piezoelectric Actuators
Authors: ---
Year: 2022 Publisher: London, United Kingdom : IntechOpen,

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With the rapid development of modern science and technology, great progress has been made in many high-tech fields such as aerospace engineering, ultra-precision machining and assembly, biomedical engineering, precision optical engineering, and micro-electromechanical systems. Since the developmental trajectory of modern high-tech fields is towards high precision and miniaturization, precision driving technology with micro-nano-level positioning accuracy is a key supporting technology. Piezoelectric driving technology has gradually become the main implementation method of micro-nano driving technology due to its high precision, fast response, strong anti-electromagnetic interference, and adaptability under extreme conditions. This book summarizes the latest progress in precision piezoelectric actuators.


Book
Advances in piezoelectric transducers
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ISBN: 9535161059 9533079312 Year: 2011 Publisher: IntechOpen

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The piezoelectric transducer converts electric signals into mechanical vibrations or vice versa by utilizing the morphological change of a crystal which occurs on voltage application, or conversely by monitoring the voltage generated by a pressure applied on a crystal. This book reports on the state of the art research and development findings on this very broad matter through original and innovative research studies exhibiting various investigation directions. The present book is a result of contributions of experts from international scientific community working in different aspects of piezoelectric transducers. The text is addressed not only to researchers, but also to professional engineers, students and other experts in a variety of disciplines, both academic and industrial seeking to gain a better understanding of what has been done in the field recently, and what kind of open problems are in this area.


Book
Piezoelectric Materials and Devices : Practice and Applications
Author:
ISBN: 9535163108 9535110454 Year: 2013 Publisher: IntechOpen

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This book is a result of contributions of experts from international scientific community working in different aspects of piezoelectric materials and devices through original and innovative research studies. Through its 7 chapters the reader will have access to works related to the various applications of piezoelectric materials such as piezoelectric stacks in level sensors, pressure sensors, actuators for functionally graded plates, active and passive health monitoring systems, machining processes, nondestructive testing of aeronautical structures and acoustic wave velocity measurements. The text is addressed not only to researchers, but also to professional engineers, students and other experts in a variety of disciplines, both academic and industrial seeking to gain a better understanding of what has been done in the field recently, and what kind of open problems are in this area.

Piezoelectric actuators and ultrasonic motors
Author:
ISBN: 0792398114 0792398122 9401073155 9400918283 Year: 1997 Publisher: Boston : Kluwer Academic Publishers,

Crystal oscillator circuits
Author:
ISBN: 0471874019 Year: 1983 Publisher: New York : Wiley,

An introduction to ultrasonic motors
Authors: ---
ISBN: 0198563957 Year: 1993 Volume: 28 Publisher: Oxford : Clarendon press,


Book
Piezoelectric Shells : Sensing, Energy Harvesting, and Distributed Control—Second Edition
Author:
ISBN: 9402412581 9402412565 Year: 2019 Publisher: Dordrecht : Springer Netherlands : Imprint: Springer,

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This book offers an introduction to piezoelectric shells and distributed sensing, energy harvesting and control applications. It familiarizes readers with a generic approach of piezoelectric shells and fundamental electromechanics of distributed piezoelectric sensors, energy harvesters and actuators applied to shell structures. The book is divided into two major parts, the first of which focuses on piezoelectric shell continua, while the second examines distributing sensing, energy harvesting and control of elastic continua, e.g., shells and plates. The exploitation of new, advanced multifunctional smart structures and structronic systems has been one of the mainstream research and development activities over the years. In the search for innovative structronics technologies, piezoelectric materials have proved to be very versatile in both sensor and actuator applications. Consequently, the piezoelectric technology has been applied to a broad range of practical applications, from small-scale nano- and micro-sensors/actuators to large-scale airplane and space structures and systems. The book provides practicing engineers and researchers with an introduction to advanced piezoelectric shell theories and distributed sensor/energy harvester/actuator technologies in the context of structural identification, energy harvesting and precision control. The book can also be used as a textbook for graduate students. This second edition contains substantial new materials, especially energy harvesting and experimental components, and has been updated and corrected for a new generation of readers. .


Book
Intentional and Inherent Nonlinearities in Piezoelectric Energy Harvesting
Author:
ISBN: 3031510461 Year: 2024 Publisher: Cham : Springer Nature Switzerland : Imprint: Springer,

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This book presents recent research in the field of piezoelectric vibration energy harvesting in which intentionally designed nonlinearities as well as inherently present are widely considered. It provides an overview of the state-of-the-art, with a sharp classification into linear and nonlinear devices, and recalls the fundamentals of piezoelectricity and magnetostatics. A detailed treatment of linear and nonlinear mathematical modeling of piezoelectric harvesters is then developed to provide the reader with a wide range of modeling possibilities. Theoretical, computational, and experimental approaches to modeling the magnetic interaction are also provided. Several cases of innovative piezoelectric harvester designs based on magnetic interaction as a frequency up-conversion mechanism (FuC) are developed. Improvements of the magnetic FuC are proposed, in combination with indirect impacts as well as the manipulation of magnetic forces with novelty methods. Novel studies on the magnetic interaction itself and its implications for the dynamic behavior of the harvester are also summarized. The book provides an integrated view of theoretical, computational, and experimental research in this field, as such it can be useful for researchers interested in linear and nonlinear piezoelectric energy harvesting, for graduate courses on smart structures and devices, microsystems, and for designers.


Book
Piezoelectric Sensors
Author:
ISBN: 3031537858 Year: 2024 Publisher: Cham : Springer International Publishing : Imprint: Springer,

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This book provides a comprehensive overview of piezoelectric sensor devices and instrumentation and their use for chemical and biochemical analysis. Sensors relying on established transducers, such as the quartz crystal microbalance (QCM) and the surface acoustic wave resonator (SAW) are covered, and novel devices like surface transverse wave (STW) resonators, film bulk acoustic resonators (FBAR) as well as non-piezoelectric devices with mass-sensitive properties are presented. As their name implies, such devices respond directly to mass changes on their surfaces and thus address the most fundamental quality of any analytes. First, the book presents the fundamentals of new measuring strategies with these devices. Then, it introduces a variety of chemo- and biosensing application scenarios of these devices. In addition, the book covers both the state-of-the-art of academic research and prospects concerning the commercialization of these sensors. Given its scope, the book is of interest to academics, specialists in industry, and advanced students in the areas of analytical chemistry, rapid analysis, and sensor technology, giving them the unique possibility to familiarize themselves with this chemical sensing strategy. Readers will benefit from the coverage of both cutting-edge research results and applications that help bridge the gap between academia and industry.

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