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Ion Implantation: Basics to Device Fabrication is a collection of research dealing with several aspects of ion implantation, including basic information on the physics of devices, ion implanters, channeling implants, yield, damage and its annealing, in addition to a host of other topics. Particular attention has been paid to those techniques that provide two-dimensional profiles of damage and of dopants, a careful treatment of silicon based devices, threshold voltage control, shallow junctions, minority carrier lifetime control by metallic ion implants, and high energy implants is given in this work. This book, based on a course preceding the biannual Ion Implantation Technology Conference, is a valuable reference for physicists, chemists, materials scientists, processing, device production, device design, and ion beam engineers interested in any aspect of ion implantation, as well as a secondary text for a graduate course on the subject.
Ion implantation --- Semiconductor doping --- Semiconductors --- Design and construction --- Ion implantation. --- Semiconductor doping. --- Design and construction. --- Semiconductors - Design and construction
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Semiconductors --- Diffusion --- Semiconductor doping --- Getters --- Defects --- Congresses --- 538.9 --- -Getters --- -Semiconductor doping --- -Semiconductors --- -Crystalline semiconductors --- Semi-conductors --- Semiconducting materials --- Semiconductor devices --- Crystals --- Electrical engineering --- Electronics --- Solid state electronics --- Doping of semiconductors --- Doped semiconductors --- Gases --- Metals --- Vacuum-tubes --- Liquids --- Physics --- Separation (Technology) --- Solution (Chemistry) --- Solutions, Solid --- Matter --- Packed towers --- Physics of condensed matter (in liquid state and solid state) --- -Congresses --- Materials --- Absorption and adsorption --- Properties --- -Physics of condensed matter (in liquid state and solid state) --- 538.9 Physics of condensed matter (in liquid state and solid state) --- -538.9 Physics of condensed matter (in liquid state and solid state) --- Crystalline semiconductors --- Defects&delete& --- Semiconductors - Defects - Congresses --- Diffusion - Congresses --- Semiconductor doping - Congresses --- Getters - Congresses
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Materials --- Diffusion --- Congresses. --- -Materials --- -Engineering --- Engineering materials --- Industrial materials --- Engineering design --- Manufacturing processes --- Gases --- Liquids --- Physics --- Separation (Technology) --- Solution (Chemistry) --- Solutions, Solid --- Matter --- Packed towers --- Semiconductor doping --- Congresses --- Properties --- -Congresses --- Materials - Congresses. --- Diffusion - Congresses.
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Statistical physics --- Mechanical properties of solids --- Diagrammes de phases. --- Transitions de phase. --- Diffusion. --- Technology. --- Materials. --- Solids. --- Solid state physics --- Transparent solids --- Engineering --- Engineering materials --- Industrial materials --- Engineering design --- Manufacturing processes --- Applied science --- Arts, Useful --- Science, Applied --- Useful arts --- Science --- Industrial arts --- Material culture --- Gases --- Liquids --- Physics --- Separation (Technology) --- Solution (Chemistry) --- Solutions, Solid --- Matter --- Packed towers --- Semiconductor doping --- Materials --- Diffusion --- Properties --- Monograph
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Air --- Pollution --- Mathematical models --- Congresses --- Modèles mathématiques --- Congrès --- Congresses. --- Diffusion. --- Mathematical models. --- Air contaminants --- Air pollutants --- Air pollution --- Air pollution control --- Air toxics --- Airborne pollutants --- Atmosphere --- Contaminants, Air --- Control of air pollution --- Pollutants, Air --- Toxics, Air --- Air quality --- Atmospheric deposition --- Models, Mathematical --- Simulation methods --- Gases --- Liquids --- Physics --- Separation (Technology) --- Solution (Chemistry) --- Solutions, Solid --- Matter --- Packed towers --- Semiconductor doping --- Pollution. --- Control --- Diffusion --- Properties --- Monograph --- Air - Pollution - Mathematical models - Congresses
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Solid state physics --- Kirkendall effect. --- Kirkendall effect --- Transport theory --- 539.219.3 --- Boltzmann transport equation --- Transport phenomena --- Mathematical physics --- Particles (Nuclear physics) --- Radiation --- Statistical mechanics --- Bulk diffusion --- Diffusion in solids --- Grain boundary diffusion --- Lattice diffusion --- Pipe diffusion --- Solids --- Volume diffusion --- Diffusion --- 539.219.3 Diffusion. Autodiffusion --- Diffusion. Autodiffusion --- Transport theory. --- DIFFUSION --- ALLOYS --- TRANSPORT THEORY --- THERMODYNAMICS --- IONIC CRYSTALS --- METALS --- IRREVERSIBLE PROCESSES --- OXIDES --- SEMICONDUCTORS --- SOLIDS --- Monograph --- Diffusion. --- Alloys. --- Thermodynamics. --- Ionic crystals. --- Metals. --- Irreversible processes. --- Oxides. --- Semiconductors. --- Solids. --- Crystalline semiconductors --- Semi-conductors --- Semiconducting materials --- Semiconductor devices --- Crystals --- Electrical engineering --- Electronics --- Solid state electronics --- Chalcogenides --- Oxygen compounds --- Processes, Irreversible --- Dynamics --- Equilibrium --- Molecular dynamics --- Thermodynamics --- Nonequilibrium thermodynamics --- Transparent solids --- Metallic elements --- Chemical elements --- Ores --- Metallurgy --- Chemistry, Physical and theoretical --- Mechanics --- Physics --- Heat --- Heat-engines --- Quantum theory --- Metallic alloys --- Metallic composites --- Metals --- Phase rule and equilibrium --- Amalgamation --- Microalloying --- Gases --- Liquids --- Separation (Technology) --- Solution (Chemistry) --- Solutions, Solid --- Matter --- Packed towers --- Semiconductor doping --- Materials --- Properties
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Cristall chemistry --- fysicochemie --- Chemical bonds --- Crystals --- Defects --- 54-16 --- 541.124-16 --- #WSCH:MACB --- 538.9 --- 620.193.4 --- 541.183 --- Reactivity (Chemistry) --- -Crystallography --- Solids --- Solid state chemistry --- -Chemistry, Solid state --- Chemistry, Physical and theoretical --- Solid state physics --- Transparent solids --- Leptology --- Physical sciences --- Mineralogy --- Bonds, Chemical --- Chemical structure --- Overlap integral --- Quantum chemistry --- Valence (Theoretical chemistry) --- Chemical reaction, Conditions and laws of --- Chemical reactions --- 541.183 Contact systems. Adsorption. Surface chemistry --- Contact systems. Adsorption. Surface chemistry --- 620.193.4 Chemical corrosion. Effect of various corrosives, acids, alkalis. Caustic embrittlement etc. --- Chemical corrosion. Effect of various corrosives, acids, alkalis. Caustic embrittlement etc. --- 538.9 Physics of condensed matter (in liquid state and solid state) --- Physics of condensed matter (in liquid state and solid state) --- 54-16 Solid phase --- Solid phase --- Crystallography --- Powders --- 541.124-16 Chemical dynamics in general. Reaction mechanism in general--?-16 --- 541.124-16 Limits of reactions--?-16 --- Chemical dynamics in general. Reaction mechanism in general--?-16 --- Limits of reactions--?-16 --- Chemical bonds. --- Crystallography. --- Reactivity (Chemistry). --- Solid state chemistry. --- Solids. --- Defects. --- Monograph --- DIFFUSION --- OXIDATION --- SINTERING --- POLYMERS --- PHOTOGRAPHY --- CORROSION --- ELECTROCHEMISTRY --- solid state reactions --- Diffusion. --- Oxidation. --- Sintering. --- Polymers. --- Photography. --- Electrochemistry. --- Polymere --- Polymeride --- Polymers and polymerization --- Macromolecules --- Frittage --- Additive manufacturing --- Iron --- Powder metallurgy --- Isostatic pressing --- Autoxidation --- Gases --- Liquids --- Physics --- Separation (Technology) --- Solution (Chemistry) --- Solutions, Solid --- Matter --- Packed towers --- Semiconductor doping --- Metallurgy --- Diffusion --- Properties --- Crystal chemistry --- -Physics of condensed matter (in liquid state and solid state) --- Crystals - Defects --- Superconductivity --- Dielectric properties of solids --- Magnetic properties of solids --- -Leptology --- Chemistry, Solid state --- CHEMICAL BONDS --- CRYSTALS --- SOLID STATE CHEMISTRY --- DEFECTS --- -Defects --- Surface chemistry --- Reactivity (chemistry)
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This volume presents an up-to-date survey of knowledge concerning addition type polymerizations. It contains nine chapters, each of which covers a particular basic term. Whenever necessary, the phenomena are discussed from the viewpoint of both stationary and non-stationary state of radical, ionic (i.e. anionic and cationic) and coordination polymerization. Special attention has been paid to the propagation process. It provides not only a general overview but also information on important special cases (theoretical conditions of propagation, influence of external factors, controlled propagatio
Chemical kinetics. --- Decomposition (Chemistry) --- Chemistry, Inorganic. --- Organometallic compounds. --- Cinétique chimique. --- Chimie inorganique. --- Décomposition (chimie) --- Composés organométalliques. --- Excited state chemistry. --- Chimie des états excités. --- Esters. --- Hydrolysis. --- Hydrolyse. --- Aromatic compounds. --- Inorganic compounds. --- Nonmetals. --- Chemical reactions. --- Composés aromatiques. --- Réactions chimiques. --- Composés inorganiques. --- Non-métaux. --- Complex compounds. --- Salts --- Composés complexes. --- Sels --- Reactivity. --- Réactivité (chimie) --- Organic compounds. --- Isomerization. --- Composés organiques. --- Isomérisation. --- Electrodes --- Chemical reactions --- Electrochemistry --- Addition polymerization --- Chemical kinetics --- 541.135.5 --- chemische reactie --- elektrode --- kinetica --- 541.135.5 Electrodes and diaphragms, e.g. --- Electrodes and diaphragms, e.g. --- Addition polymerization. --- Chemical reaction, Kinetics of --- Chemical reaction, Rate of --- Chemical reaction, Velocity of --- Chemical reaction rate --- Chemical reaction velocity --- Kinetics, Chemical --- Rate of chemical reaction --- Reaction rate (Chemistry) --- Velocity of chemical reaction --- Chemical affinity --- Reactivity (Chemistry) --- Anionic polymerization --- Cationic polymerization --- Chain addition polymerization --- Chain-growth polymerization --- Free-radical polymerization --- Ionic polymerization --- Polymerization --- Reactions, Chemical --- Chemical processes --- Electric resistors --- Chemistry, Physical and theoretical --- 530.145 --- 530.145 Quantum theory --- Quantum theory --- 678.02:66.095.2 --- 678.02:66.095.2 Manufacturing processes and operations-:-Chemical technology. Chemical and related industries--?.095.2 --- Manufacturing processes and operations-:-Chemical technology. Chemical and related industries--?.095.2 --- 541.183 --- Surface chemistry --- Catalysis --- Corrosion and anti-corrosives --- Solid-liquid interfaces --- Liquid-solid interfaces --- Interfaces (Physical sciences) --- Anti-corrosive paint --- Atmospheric corrosion --- Metal corrosion --- Metals --- Rust --- Rustless coatings --- Chemical inhibitors --- Chemistry, Technical --- Fouling --- Materials --- Weathering --- Paint --- Protective coatings --- Waterproofing --- Activation (Chemistry) --- Chemistry, Surface --- Interfaces, Chemistry of --- Surface phenomena --- Surfaces (Chemistry) --- Capillarity --- Surface energy --- Surface tension --- Surfaces (Physics) --- 541.183 Contact systems. Adsorption. Surface chemistry --- Contact systems. Adsorption. Surface chemistry --- Corrosion --- Deterioration --- Surfaces --- Chemical reaction [Rate of ] --- Diffusion. --- Gases --- Liquids --- Physics --- Separation (Technology) --- Solution (Chemistry) --- Solutions, Solid --- Matter --- Packed towers --- Semiconductor doping --- Diffusion --- Properties --- Electrodes. --- Electrochemistry. --- 541.124 --- 539.219.3 --- Charge exchange. --- Tunneling (Physics) --- Penetration probability --- Quantum mechanical tunneling --- Tunnel effect --- Electric conductivity --- Solids --- Electron transfer --- Exchange, Charge --- Transfer, Electron --- Charge transfer --- Collisions (Nuclear physics) --- Chemical reaction, Conditions and laws of --- 539.219.3 Diffusion. Autodiffusion --- Diffusion. Autodiffusion --- 541.124 Chemical dynamics in general. Reaction mechanism in general --- 541.124 Limits of reactions --- Chemical dynamics in general. Reaction mechanism in general --- Limits of reactions --- Electrochemical analysis. --- Voltammetry. --- Voltametry --- Electrochemical analysis --- Analysis, Electrochemical --- Analysis, Electrolytic --- Electroanalysis --- Electrolytic analysis --- Analytical chemistry --- Quantitative
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