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Computer-aided-design (CAD) of semiconductor microtransducers is relatively new in contrast to their counterparts in the integrated circuit world. Integrated silicon microtransducers are realized using microfabrication techniques similar to those for standard integrated circuits (ICs). Unlike IC devices, however, microtransducers must interact with their environment, so their numerical simulation is considerably more complex. While the design of ICs aims at suppressing "parasitic” effects, microtransducers thrive on optimizing the one or the other such effect. The challenging quest for physical models and simulation tools enabling microtransducer CAD is the topic of this book. The book is intended as a text for graduate students in Electrical Engineering and Physics and as a reference for CAD engineers in the microsystems industry.

Transducers --- Microelectronics --- Computer-aided design --- -Transducers --- -Electric apparatus and appliances --- Electromechanical devices --- Electronic apparatus and appliances --- Microminiature electronic equipment --- Microminiaturization (Electronics) --- Electronics --- Microtechnology --- Semiconductors --- Miniature electronic equipment --- -Computer-aided design --- Electric apparatus and appliances --- Electronics. --- Microelectronics. --- Nanotechnology. --- Optical materials. --- Electronic materials. --- Computer simulation. --- Numerical analysis. --- Electronics and Microelectronics, Instrumentation. --- Optical and Electronic Materials. --- Simulation and Modeling. --- Numerical Analysis. --- Mathematical analysis --- Computer modeling --- Computer models --- Modeling, Computer --- Models, Computer --- Simulation, Computer --- Electromechanical analogies --- Mathematical models --- Simulation methods --- Model-integrated computing --- Electronic materials --- Optics --- Materials --- Molecular technology --- Nanoscale technology --- High technology --- Electrical engineering --- Physical sciences --- Computer-aided design. --- Transducers - Computer-aided design --- Microelectronics - Computer-aided design