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Soft x-rays and extreme ultraviolet radiation : principles and applications
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ISBN: 9781139164429 9780521652148 9780521029971 1139164422 9781139648936 1139648934 0521652146 9781139638487 1139638483 1316085090 1139636421 1139641328 Year: 1999 Publisher: Cambridge, England : Cambridge University Press,

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Abstract

This detailed, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The author begins by presenting the relevant basic principles such as radiation and scattering, wave propagation, diffraction, and coherence. He then goes on to examine a broad range of phenomena and applications. The topics covered include spectromicroscopy, EUV astronomy, synchrotron radiation, and soft X-ray lasers. The author also provides a wealth of useful reference material such as electron binding energies, characteristic emission lines and photo-absorption cross-sections. The book will be of great interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practising engineers involved in semiconductor fabrication and materials science.

Coherent Sources of XUV Radiation : Soft X-Ray Lasers and High-Order Harmonic Generation
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ISBN: 0387230076 0387299904 Year: 2006 Publisher: New York, NY : Springer New York : Imprint: Springer,

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Extreme ultraviolet radiation, also referred to as soft X-rays or XUV, offers very special optical properties. The X-UV refractive index of matter is such that normal reflection cannot take place on polished surfaces whereas beam transmission through one micrometer of almost all materials reduces to zero. Therefore, it has long been a difficult task to imagine and to implement devices designed for complex optics experiments in this wavelength range. Thanks to new sources of coherent radiation - XUV-lasers and High Order Harmonics - the use of XUV radiation, for interferometry, holography, diffractive optics, non-linear radiation-matter interaction, time-resolved study of fast and ultrafast phenomena and many other applications, including medical sciences, is ubiquitous.

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