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As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semiconductor inspection systems is being pushed to image at increasingly shorter DUV wavelengths to facilitate inspection of deep sub-micron features in integrated circuits. DUV-sensitive charge-coupled device (CCD) cameras are in demand for these applications. Although CCD cameras that are responsive at DUV wavelengths are now available, their long-term stability is still a major concern. This book describes the degradation mechanisms and long-term performance of CCDs in the DUV, along with new results of device performance at these wavelengths.

Charge coupled devices. --- Detectors. --- Ultraviolet radiation. --- Lasers. --- Light amplification by stimulated emission of radiation --- Masers, Optical --- Optical masers --- Light amplifiers --- Light sources --- Optoelectronic devices --- Nonlinear optics --- Optical parametric oscillators --- Black light --- Light, Black --- Light, Ultraviolet --- Rays, Ultraviolet --- U-V light --- U-V radiation --- U-V rays --- Ultra-violet radiation --- Ultra-violet rays --- Ultraviolet light --- Ultraviolet rays --- UV light --- UV radiation --- UV rays --- Radiation --- Sensors --- Engineering instruments --- Physical instruments --- CCD (Electronics) --- Image converters --- Integrated circuits --- Signal processing --- Charge transfer devices (Electronics) --- Metal oxide semiconductors --- Equipment and supplies --- Optical materials. --- Engineering. --- Electronics. --- Optical and Electronic Materials. --- Optics, Lasers, Photonics, Optical Devices. --- Engineering, general. --- Electronics and Microelectronics, Instrumentation. --- Construction --- Industrial arts --- Technology --- Electrical engineering --- Physical sciences --- Optics --- Materials --- Electronic materials. --- Photonics. --- Microelectronics. --- Microminiature electronic equipment --- Microminiaturization (Electronics) --- Electronics --- Microtechnology --- Semiconductors --- Miniature electronic equipment --- New optics --- Electronic materials