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This book presents an updated, systematic review of the latest developments in diamond CVD processes, with emphasis on the nucleation and early growth of diamond CVD. The objective is to familiarize the reader with the scientific and engineering aspects of diamond CVD, and to provide experiences researchers, scientists, and engineers in academia and industry with the latest developments in this growing field.

Solid state physics --- Diamonds, Artificial. --- Chemical vapor deposition.

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Chemical vapor deposition (CVD) techniques have played a major role in the development of modern technology, and the rise of nanotechnology has further increased their importance, thanks to techniques such as atomic layer deposition (ALD) and vapor liquid solid growth, which are able to control the growth process at the nanoscale. This book aims to contribute to the knowledge of recent developments in CVD technology and its applications. To this aim, important process innovations, such as spatial ALD, direct liquid injection CVD, and electron cyclotron resonance CVD, are presented. Moreover, some of the most recent applications of CVD techniques for the growth of nanomaterials, including graphene, nanofibers, and diamond-like carbon, are described in the book.

Chemical vapor deposition. --- CVD (Chemical vapor deposition) --- Deposition, Chemical vapor --- Vapor deposition, Chemical --- Vapor-plating --- Physical Sciences --- Engineering and Technology --- Material Science --- Nanotechnology and Nanomaterials

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Semiconductors made from amorphous silicon have recently become important for their commercial applications in optical and electronic devices including FAX machines, solar cells, and liquid crystal displays. Plasma Deposition of Amorphous Silicon-Based Materials is a timely, comprehensive reference book written by leading authorities in the field. This volume links the fundamental growth kinetics involving complex plasma chemistry with the resulting semiconductor film properties and the subsequent effect on the performance of the electronic devices produced.Key Features* Foc

Amorphous semiconductors --- Silicon alloys. --- Plasma-enhanced chemical vapor deposition. --- Design and construction. --- Plasma-enhanced chemical vapor deposition --- Silicon alloys --- Design and construction

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Microelectronics industry. --- Molecular beams --- Microelectronics --- Plasma-enhanced chemical vapor deposition --- Industrial applications. --- Materials. --- Plasma-enhanced CVD --- Microminiature electronic equipment --- Microminiaturization (Electronics) --- Molecular rays --- Positive rays --- Chemical vapor deposition --- Electronics --- Microtechnology --- Semiconductors --- Miniature electronic equipment --- Molecular dynamics --- Electronic industries

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Chemical vapor deposition. --- Nanoparticles. --- Organic compounds --- CVD (Chemical vapor deposition) --- Deposition, Chemical vapor --- Vapor deposition, Chemical --- Vapor-plating --- Nano-particles --- NPs (Nanoparticles) --- Nanoscale particles --- Nanostructured materials --- Particles --- Chemistry, Organic --- Chemistry, Synthetic organic --- Organic synthesis (Chemistry) --- Synthetic organic chemistry --- Synthesis. --- Synthesis