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Refrigeration systems and applications.
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ISBN: 0471623512 Year: 2003 Publisher: Chichester Wiley

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Nano- and microelectromechanical systems : fundamentals of nano- and microengineering
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ISBN: 0849309166 9780849309168 Year: 2001 Publisher: Boca Raton: CRC,


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Industrial gases
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ISBN: 0751403520 9786610208128 1280208120 0306473712 Year: 2002 Publisher: New York, New York : Kluwer Academic Publishers,

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Industrial gases are inextricably woven into the fabric of modern manufacturing. From the primary extraction of raw materials, through their intermediate processing to manufacture metals, chemicals and ceramics, to the fabrication of sophisticated industrial, consumer and food products, gases are used across the whole spectrum of industry. The isolation, manufature and supply of these gases is a major industry in itself; the 300 million tones of gas used each year generates sales in excess of $20 billion. In terms of tonnage, nitrogen has become the most used industrial gas, finding applications across the whole range of industry. It is still manufactured by liquifying and then distilling air, but as applications develop and demand increases, newer methods of isolation, such as pressure swing absorbtion and membrane seperation will become important. This new book introduces the main industrial gases and the gases industry, it discusses the main technologies for their isolation, seperation, manufacture and handling. In addition, the book contains an overview of the main applications of industrial gases and a brief discussion of new production processes and applications. Chemists, chemical engineers, physicists and technologists involved in the research and development, production or utilisation of industrial gases will find this concise book an essenitiil and accessable reference source. For advanced students of these disciplines, the book provides a fascinating overview of this important industry.

Micromachined transducers sourcebook
Author:
ISBN: 9780072907223 0072907223 Year: 1998 Publisher: Boston: WCB/McGraw-Hill,

The MEMS handbook. 2 : Design and fabrication.
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ISBN: 0849391385 Year: 1977 Publisher: Cleveland CRC Press

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Thoroughly revised and updated, the new edition of the best-selling MEMS Handbook is now presented as a three-volume set that offers state-of-the-art coverage of microelectromechanical systems. Through chapters contributed by top experts and pioneers in the field, MEMS: Design and Fabrication presents a comprehensive look at the materials, procedures, tools, and techniques of MEMS fabrication. New chapters in this edition examine the materials and fabrication of polymer microsystems and optical diagnostics for investigating the entrance length in microchannels. Rigorous yet accessible, this volume provides the practical knowledge needed for work in cutting-edge MEMS applications.

MEMS mechanical sensors
Author:
ISBN: 1580538738 9781580538732 1580535364 9781580535366 Year: 2004 Publisher: Boston Artech House

Micro electro mechanical system design.
Author:
ISBN: 0824758242 9780824758240 9780429116865 Year: 2005 Publisher: Boca Raton Taylor and Francis

Silicon wafer bonding technology : for VLSI and MEMS applications
Author:
ISBN: 0852960395 9780852960394 Year: 2002 Volume: 1 Publisher: London: Institution of electrical engineers,

Introduction to microelectromechanical (MEM) microwave systems
Author:
ISBN: 089006282X 9780890062821 Year: 1999 Publisher: Boston (Mass.): Artech House,

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