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Plasma etching : fundamentals and applications
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ISBN: 019856287X Year: 1998 Publisher: Oxford Oxford university press

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Plasma processes for semiconductor fabrication.
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ISBN: 0521591759 Year: 1999 Publisher: Cambridge Cambridge University press

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Etching compositions and processes
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ISBN: 0815509138 Year: 1982 Publisher: Park Ridge Noyes data corporation

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Keywords

Etching reagents --- Metals --- Patents --- Etching --- Patents

CRC handbook of metal etchants
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ISBN: 0849336236 Year: 1977 Publisher: Cleveland CRC Press

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Lithography process control.
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ISBN: 0819430528 Year: 1999 Publisher: Bellingham SPIE

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Dry etching for microelectronics
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ISBN: 0444869050 1299774121 0080983588 9780444869050 Year: 1984 Volume: 4 Publisher: Amsterdam North-Holland

Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions
Authors: --- ---
ISBN: 0815512201 Year: 1990 Volume: vol *8 Publisher: Park Ridge Noyes Publications

Silicon processing for the VLSI era. 1 : Process technology.
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ISBN: 0961672137 Year: 1986 Publisher: Sunset Beach Lattice press

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Silicon processing for the VLSI era. 1 : Process technology.
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ISBN: 0961672161 Year: 2000 Publisher: Sunset Beach Lattice press

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Oberflächentechnologie mit Niederdruckplasmen : Beschichten und Strukturieren in der Mikrotechnik.
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ISBN: 3540573607 Year: 1994 Publisher: Berlin Springer

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