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Fysica --- Ion beam lithography --- Lithografie door elektronenbundel --- Lithografie door ionenbundel --- Lithografie door röntgenstralen --- Lithographie par faisceau d'ions --- Lithographie par faisceau d'électrons --- Lithographie par rayons X --- Lithography [Electron beam ] --- Natuurkunde --- Physics --- Physique --- X-ray lithography --- Lithography, Electron beam. --- X-ray lithography. --- Ion beam lithography. --- Physics. --- 621.3.049.77 --- Lithography, Electron beam --- 538.97 --- Lithography --- X-rays --- Natural philosophy --- Philosophy, Natural --- Physical sciences --- Dynamics --- Electron beam lithography --- Electron beams --- Microelectronics --- Photolithography --- Ion bombardment --- Microelectronics. Integrated circuits --- Special geometry and interaction with particles and radiation --- Industrial applications --- 538.97 Special geometry and interaction with particles and radiation --- 621.3.049.77 Microelectronics. Integrated circuits