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"This work presents a view of the dynamics of MEMS (microelectromechanical systems), microstructures, and their responses. The focus is on the mechanical/structural micro domain and the compliant nature of mechanical transmission." "Features of this work include: an in-depth treatment of problems that involve reliable modeling, analysis and design; analytical models with correct dependences on service dimensions, cantilever based systems for nanofabrication researchers and designers; and dynamics of complex spring and beam microsystems." "This book contains fully-solved examples as well as end-of-the-chapter proposed problems. Dynamics of Microelectromechanical Systems is a reference for microstructural engineers, microengineers, and MEMS specialists."--

Engineering. --- Electronics and Microelectronics, Instrumentation. --- Nanotechnology. --- Circuits and Systems. --- Computer-Aided Engineering (CAD, CAE) and Design. --- Mechanical Engineering. --- Computer aided design. --- Mechanical engineering. --- Electronics. --- Systems engineering. --- Ingénierie --- Conception assistée par ordinateur --- Génie mécanique --- Electronique --- Ingénierie des systèmes --- Nanotechnologie --- Microelectromechanical systems --- Microstructure --- Electrical & Computer Engineering --- Electrical Engineering --- Engineering & Applied Sciences --- MEMS (Microelectromechanical systems) --- Micro-electro-mechanical systems --- Micro-machinery --- Microelectromechanical devices --- Micromachinery --- Micromachines --- Micromechanical devices --- Micromechanical systems --- Computer-aided engineering. --- Microelectronics. --- Electronic circuits. --- Engineering systems --- System engineering --- Engineering --- Industrial engineering --- System analysis --- CAD (Computer-aided design) --- Computer-assisted design --- Computer-aided engineering --- Design --- Molecular technology --- Nanoscale technology --- High technology --- Electrical engineering --- Physical sciences --- Engineering, Mechanical --- Machinery --- Steam engineering --- Design and construction --- Microelectromechanical systems. --- CAE --- Electron-tube circuits --- Electric circuits --- Electron tubes --- Electronics --- Microminiature electronic equipment --- Microminiaturization (Electronics) --- Microtechnology --- Semiconductors --- Miniature electronic equipment --- Data processing --- Materials --- Matter --- Morphology --- Micromechanics --- Stereology --- Electromechanical devices --- Mechatronics --- Constitution --- Systèmes microélectromécaniques. --- Microstructure. --- Microstructure (physique)