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This work is an investigation of preliminary steps in the microfabrication of titanium nitride microheaters to be integrated under the surface of flight mirrors. This work focuses on the analysis of titanium thin films properties as a function of thickness.

Microheaters --- Titanium nitride --- TiN --- Sputtering --- Ion Beam Sputtering --- IBS --- Laser-Induced Forward Transfer --- LIFT Thin films --- Ingénierie, informatique & technologie > Ingénierie aérospatiale