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Dissertation
Microcrystalline silicon thin films deposited by VHF plasmas for solar cell applications
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Authors:
Flückiger, Roger Sylvain
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Université de Neuchâtel. Institut de microtechnique
ISBN: 3891919654 Year: 1995 Publisher: Konstanz Hartung-Gorre
ISBN: 3891919654 Year: 1995 Publisher: Konstanz Hartung-Gorre
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Abstract
Keywords
Plasma-enhanced chemical vapor deposition --- Silane --- Solar cells --- Thin films --- Materials
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