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621.3'7 --- Microlithography --- -Photoresists --- -Plasma etching --- -Semiconductors --- -Crystalline semiconductors --- Semi-conductors --- Semiconducting materials --- Semiconductor devices --- Crystals --- Electrical engineering --- Electronics --- Solid state electronics --- Dry etching --- Etching --- Photoresist --- Resists, Photosensitive --- Microelectronics --- Masks (Electronics) --- Photolithography --- Lithography --- Microtechnology --- Electrical engineering--?'7 --- Congresses --- -Congresses --- Materials --- -Electrical engineering--?'7 --- 621.3'7 Electrical engineering--?'7 --- Photoresists --- Plasma etching --- Semiconductors --- Crystalline semiconductors --- Etching&delete& --- Integrated circuits --- Resist materials