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Book
X-ray optics made by X-ray lithography: Process optimization and quality control
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ISBN: 1000070029 3731506793 Year: 2017 Publisher: KIT Scientific Publishing

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Abstract

Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample’s microstructure without the need for ultrahigh spatial resolution. The technique relies on grating structures with micrometric periods and extreme aspect ratio – their fabrication by X-ray lithography with optimal structure quality is the topic of this work.


Book
Vergrößerung des Sehfeldes der Röntgen-Phasenkontrast-Bildgebung für die klinische Anwendung
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ISBN: 1000075852 3731507315 Year: 2017 Publisher: KIT Scientific Publishing

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Abstract

X-ray phase contrast imaging is a highly promising technology for the clinical diagnostic. Particularly high demands are placed on the required X-ray gratings, as the core element of this method. Such gratings can be fabricated using LIGA-technology, where the structured area is currently limited to a few centimeters in the diagonal (e.g. 10 cm). In this work possibilities to enlarge the area of X-ray gratings, as they are required for the Talbot-Lau Interferometry, were developed and analyzed.

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