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Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray imaging in the detection of subtle density differences and opens a way to characterize a sample’s microstructure without the need for ultrahigh spatial resolution. The technique relies on grating structures with micrometric periods and extreme aspect ratio – their fabrication by X-ray lithography with optimal structure quality is the topic of this work.
Talbot effect --- Röntgengitter --- LIGA --- X-ray optics --- Phasenkontrast --- Talbot-Effect --- phase contrast --- X-ray gratings --- Röntgenoptik
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X-ray phase contrast imaging is a highly promising technology for the clinical diagnostic. Particularly high demands are placed on the required X-ray gratings, as the core element of this method. Such gratings can be fabricated using LIGA-technology, where the structured area is currently limited to a few centimeters in the diagonal (e.g. 10 cm). In this work possibilities to enlarge the area of X-ray gratings, as they are required for the Talbot-Lau Interferometry, were developed and analyzed.
Kacheln --- Talbot-Lau Interferometry --- Röntgengitter --- Talbot-Lau Interferometrie --- Röntgenbildgebung --- LIGA-Technik --- tiling --- LIGA-technology --- X-ray gratings --- X-ray imaging
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