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537.5

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537.5

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537.5 + 538.3

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Ion implantation --- Materials --- 537.5 --- 538.91 <063> --- 538.97 <063> --- 539.23 <063> --- 537.5 Electron and ion phenomena. Discharges. Plasmas. Radiations --- Electron and ion phenomena. Discharges. Plasmas. Radiations --- 539.23 <063> Production of thin films--Congressen --- Production of thin films--Congressen --- 538.97 <063> Special geometry and interaction with particles and radiation--Congressen --- Special geometry and interaction with particles and radiation--Congressen --- 538.91 <063> Structures, including transitions--Congressen --- Structures, including transitions--Congressen --- Engineering --- Engineering materials --- Industrial materials --- Engineering design --- Manufacturing processes --- Congresses --- Effect of radiation on&delete& --- Solid state physics --- Effect of radiation on