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1997 (2)

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1997 2nd International Symposium on Plasma Process-Induced Damage : 13-14 May 1997, Monterey, California, USA
Authors: Cheung, Kin P --- Nakamura, Moritaka --- Gabriel, Calvin T. --- International Symposium on Plasma Process-Induced Damage --- American Vacuum Society --- et al.
Year: 1997 Publisher: [Place of publication not identified] Northern California Chapter of the American Vacuum Society

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Keywords
Semiconductor wafers --- Semiconductors --- Plasma etching --- Defects --- Effect of radiation on --- Congresses.

Book

1997 2nd International Symposium on Plasma Process-Induced Damage : 13-14 May 1997, Monterey, California, USA
Authors: Cheung, Kin P --- Nakamura, Moritaka --- Gabriel, Calvin T. --- International Symposium on Plasma Process-Induced Damage --- American Vacuum Society --- et al.
Year: 1997 Publisher: [Place of publication not identified] Northern California Chapter of the American Vacuum Society

Abstract | Keywords | Export | Availability | Bookmark

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Abstract

Keywords
Semiconductor wafers --- Semiconductors --- Plasma etching --- Electrical & Computer Engineering --- Electrical Engineering --- Engineering & Applied Sciences --- Defects --- Effect of radiation on --- Congresses.

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