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Spectroscopic ellipsometry and reflectometry : a user's guide
Authors: ---
ISBN: 0471181722 9780471181729 Year: 1999 Publisher: New York (N.Y.): Wiley,

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Abstract

While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry. A guide for practitioners and researchers in a variety of disciplines, it addresses a broad range of applications in physics, chemistry, electrical engineering, and materials science.

A user's guide to ellipsometry
Author:
ISBN: 0126939500 1299195350 0323140009 9780126939507 Year: 1993 Publisher: Boston (Mass.): Academic press,


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Ellipsometry and polarized light
Authors: ---
ISBN: 0720406943 9780720406948 Year: 1977 Publisher: Amsterdam: North-Holland,

Handbook of ellipsometry
Authors: ---
ISBN: 0815514999 0080947069 9786612002632 1282002635 0815517475 9786612002625 1591248493 1591242126 9781591242123 9780815517474 9780815517481 0815517483 9780815513650 0815513658 9780815514992 3540222936 9783540222934 9781591248491 9780815517467 0815517467 9786612002649 1282769227 9786612769221 0080946070 1282002643 Year: 2005 Publisher: Norwich, NY : Heidelberg, Germany : William Andrew Pub. ; Springer,

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Abstract

The Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated circuits and breakthroughs in knowledge of biological macromolecules deriving from DNA and protein surface research. Ellipsometry does not contact or damage samples, and is an ideal measurement technique for determining optical and physical properties of materials at the nano scale. With the

Spectroscopic ellipsometry : principles and applications
Author:
ISBN: 9780470016084 0470016086 Year: 2009 Publisher: Chichester: Wiley,

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