Abstract | Keywords | Export | Availability | Bookmark

Choose an application

• Reference Manager
• EndNote
• RefWorks (Direct export to RefWorks)

Optical microelectromechanical systems (MEMS), microoptoelectromechanical systems (MOEMS), or optical microsystems are devices or systems that interact with light through actuation or sensing at a micro- or millimeter scale. Optical MEMS have had enormous commercial success in projectors, displays, and fiberoptic communications. The best-known example is Texas Instruments’ digital micromirror devices (DMDs). The development of optical MEMS was impeded seriously by the Telecom Bubble in 2000. Fortunately, DMDs grew their market size even in that economy downturn. Meanwhile, in the last one and half decade, the optical MEMS market has been slowly but steadily recovering. During this time, the major technological change was the shift of thin-film polysilicon microstructures to single-crystal–silicon microsructures. Especially in the last few years, cloud data centers are demanding large-port optical cross connects (OXCs) and autonomous driving looks for miniature LiDAR, and virtual reality/augmented reality (VR/AR) demands tiny optical scanners. This is a new wave of opportunities for optical MEMS. Furthermore, several research institutes around the world have been developing MOEMS devices for extreme applications (very fine tailoring of light beam in terms of phase, intensity, or wavelength) and/or extreme environments (vacuum, cryogenic temperatures) for many years. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on (1) novel design, fabrication, control, and modeling of optical MEMS devices based on all kinds of actuation/sensing mechanisms; and (2) new developments of applying optical MEMS devices of any kind in consumer electronics, optical communications, industry, biology, medicine, agriculture, physics, astronomy, space, or defense.

stray light --- input shaping --- n/a --- wavefront sensing --- signal-to-noise ratio (SNR) --- LC micro-lenses controlled electrically --- infrared --- intraoperative microscope --- MEMS mirror --- MLSSP --- ocular aberrations --- MEMS scanning micromirror --- electrothermal actuation --- electrothermal bimorph --- open-loop control --- wavelength dependent loss (WDL) --- NIR fluorescence --- infrared Fabry–Perot (FP) filtering --- two-photon --- resonant MEMS scanner --- residual oscillation --- 3D measurement --- parametric resonance --- digital micromirror device --- quality map --- metalens --- flame retardant 4 (FR4) --- angle sensor --- optical switch --- metasurface --- vibration noise --- optical coherence tomography --- spectrometer --- reliability --- quasistatic actuation --- Huygens’ metalens --- confocal --- large reflection variations --- electrostatic --- dual-mode liquid-crystal (LC) device --- field of view (FOV) --- scanning micromirror --- fluorescence confocal --- variable optical attenuator (VOA) --- micro-electro-mechanical systems (MEMS) --- microscanner --- laser stripe width --- polarization dependent loss (PDL) --- fringe projection --- 2D Lissajous --- usable scan range --- laser stripe scanning --- bio-optical imaging --- MEMS scanning mirror --- digital micromirror device (DMD) --- Cu/W bimorph --- echelle grating --- achromatic --- DMD chip --- tunable fiber laser --- programmable spectral filter --- higher-order modes --- electromagnetic actuator --- infrared Fabry-Perot (FP) filtering --- Huygens' metalens