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Co-integration of sensors with their associated electronics on a single silicon chip may provide many significant benefits regarding performance, reliability, miniaturization and process simplicity without significantly increasing the total cost. Micromachined Thin-Film Sensors for SOI-CMOS Co-integration covers the challenges and interests and demonstrates the successful co-integration of gas-flow sensors on dielectric membrane, with their associated electronics, in CMOS-SOI technology. We firstly investigate the extraction of residual stress in thin layers and in their stacking and the release, in post-processing, of a 1 µm-thick robust and flat dielectric multilayered membrane using Tetramethyl Ammonium Hydroxide (TMAH) silicon micromachining solution. The optimization of its selectivity towards aluminum is largely demonstrated. The second part focuses on sensors design and characteristics. A novel loop-shape polysilicon microheater is designed and built in a CMOS-SOI standard process. High thermal uniformity, low power consumption and high working temperature are confirmed by extensive measurements. The additional gas flow sensing layers are judiciously chosen and implemented. Measurements in the presence of a nitrogen flow and gas reveal fair sensitivity on a large flow velocity range as well as good response to many gases. Finally, MOS transistors suspended on released dielectric membranes are presented and fully characterized as a concluding demonstrator of the co-integration in SOI technology.

Gas flow. --- Thin film devices. --- Silicon-on-insulator technology. --- Metal oxide semiconductors, Complementary. --- Flow of gas --- Gases, Flow of --- Aerodynamics --- Gas dynamics --- Air flow --- CMOS (Electronics) --- Complementary metal oxide semiconductors --- Semiconductors, Complementary metal oxide --- Digital electronics --- Logic circuits --- Transistor-transistor logic circuits --- SOI devices --- Electric insulators and insulation --- Semiconductors --- Devices, Thin film --- Electronic apparatus and appliances --- Thin films --- Engineering. --- Mechanics. --- Industrial engineering. --- Electronics. --- Systems engineering. --- Engineering, general. --- Classical Mechanics. --- Industrial and Production Engineering. --- Electronics and Microelectronics, Instrumentation. --- Circuits and Systems. --- Solid State Physics. --- Electrical engineering --- Physical sciences --- Engineering systems --- System engineering --- Engineering --- Industrial engineering --- System analysis --- Management engineering --- Simplification in industry --- Value analysis (Cost control) --- Classical mechanics --- Newtonian mechanics --- Physics --- Dynamics --- Quantum theory --- Construction --- Industrial arts --- Technology --- Design and construction --- Production engineering. --- Microelectronics. --- Electronic circuits. --- Solid state physics. --- Solids --- Electron-tube circuits --- Electric circuits --- Electron tubes --- Electronics --- Microminiature electronic equipment --- Microminiaturization (Electronics) --- Microtechnology --- Miniature electronic equipment --- Manufacturing engineering --- Process engineering --- Mechanical engineering

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The volume contains some of the most recent knowledge on Functional Nanomaterials and Devices. The papers are grouped into: 1. semiconductor-on-insulator structures, devices and sensors; 2. physics of new functional nanodevices and sensors; 3. diagnostics methods of nanomaterials and devices; 4. functional nanomaterials in medicine. The first part considers transport phenomena in thin silicon layer near back SiO2-Si interface of the SOI structures fabricated with DELICATE technology, mobility increase in high doped nanowire junctionless multigate MOSFETs; photoconductance and LF noises in the

Engineering --- Material Science and Metallurgy --- Physics --- Civil Engineering --- General and Others --- Solid State Physics --- Nanostructured materials --- Nanotechnology --- Nanostructured materials. --- Nanotechnology. --- Molecular technology --- Nanoscale technology --- High technology --- Nanomaterials --- Nanometer materials --- Nanophase materials --- Nanostructure controlled materials --- Nanostructure materials --- Ultra-fine microstructure materials --- Microstructure