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The MEMS (Micro Electro-Mechanical Systems) market returned to growth in 2010. The total MEMS market is worth about 6.5 billion, up more than 11 percent from last year and nearly as high as its historic peak in 2007. MEMS devices are used across sectors as diverse as automotive, aerospace, medical, industrial process control, instrumentation and telecommunications - forming the nerve center of products including airbag crash sensors, pressure sensors, biosensors and ink jet printer heads. Part of the MEMS cluster within the Micro & Nano Technologies Series, this book covers the fab

Thick films. --- Ceramic coating. --- Microelectromechanical systems. --- Microelectronics. --- Microminiature electronic equipment --- Microminiaturization (Electronics) --- Electronics --- Microtechnology --- Semiconductors --- Miniature electronic equipment --- MEMS (Microelectromechanical systems) --- Micro-electro-mechanical systems --- Micro-machinery --- Microelectromechanical devices --- Micromachinery --- Micromachines --- Micromechanical devices --- Micromechanical systems --- Electromechanical devices --- Mechatronics --- Coating, Ceramic --- Coatings --- Protective coatings --- Refractory coating --- Films, Thick --- Microelectronics --- Surfaces (Technology) --- Thin films