TY - BOOK ID - 9577233 TI - 2008 International Symposium on Semiconductor Manufacturing (ISSM) : 27-29 Oct. 2008 PY - 2008 SN - 1612849482 4990413822 PB - Piscataway, New Jersey : Institute of Electrical and Electronics Engineers, DB - UniCat KW - Semiconductors KW - Design and construction UR - https://www.unicat.be/uniCat?func=search&query=sysid:9577233 AB - ER -