TY - BOOK ID - 929666 TI - Ion implantation in semiconductors and other materials PY - 1973 SN - 0306307561 1468420666 146842064X 9780306307560 PB - New York (N.Y.): Plenum, DB - UniCat KW - Electronics and optics of solids KW - Ion implantation KW - Semiconductors KW - Congresses KW - 538.91 KW - -Semiconductors KW - -538.97 KW - Crystalline semiconductors KW - Semi-conductors KW - Semiconducting materials KW - Semiconductor devices KW - Crystals KW - Electrical engineering KW - Electronics KW - Solid state electronics KW - Implantation, Ion KW - Ion bombardment KW - Ion plating KW - Structures, including transitions KW - Special geometry and interaction with particles and radiation KW - Materials KW - 538.97 Special geometry and interaction with particles and radiation KW - 538.91 Structures, including transitions KW - 538.97 KW - Ion implantation - Congresses KW - Semiconductors - Congresses UR - https://www.unicat.be/uniCat?func=search&query=sysid:929666 AB - ER -