TY - BOOK ID - 88202731 TI - Phenomena, properties, and applications PY - 1999 SN - 9780125139052 0125139055 9786613173805 0080533531 1283173808 0125139071 9780125139076 0125139063 9780125139069 PB - San Diego : Academic Press, DB - UniCat KW - Integrated circuits KW - Dielectrics. KW - Electrical engineering KW - Electric insulators and insulation KW - Chips (Electronics) KW - Circuits, Integrated KW - Computer chips KW - Microchips KW - Electronic circuits KW - Microelectronics KW - Materials. KW - Materials UR - https://www.unicat.be/uniCat?func=search&query=sysid:88202731 AB - Recent developments in microelectronics technologies have created a great demand for interlayer dielectric materials with a very low dielectric constant. They will play a crucial role in the future generation of IC devices (VLSI/UISI and high speed IC packaging). Considerable efforts have been made to develop new low as well as high dielectric constant materials for applications in electronics industries. Besides achieving either low or high dielectric constants, other materials' properties such as good processability, high mechanical strength, high thermal and environmental stability, low the ER -