TY - BOOK ID - 823308 TI - Ion implantation of semiconductors. AU - Carter, G. AU - Grant, W. A. PY - 1976 SN - 0713133651 0713133589 PB - London Arnold DB - UniCat KW - Electronics and optics of solids KW - Ion implantation KW - Semiconductor doping KW - Semiconductors KW - -538.9 KW - Crystalline semiconductors KW - Semi-conductors KW - Semiconducting materials KW - Semiconductor devices KW - Crystals KW - Electrical engineering KW - Electronics KW - Solid state electronics KW - Doping of semiconductors KW - Diffusion KW - Doped semiconductors KW - Implantation, Ion KW - Ion bombardment KW - Ion plating KW - Effect of radiation on KW - Physics of condensed matter (in liquid state and solid state) KW - Materials KW - Defects KW - 538.9 Physics of condensed matter (in liquid state and solid state) KW - 538.9 KW - Semiconductors, Effect of radiation on UR - https://www.unicat.be/uniCat?func=search&query=sysid:823308 AB - ER -