TY - BOOK ID - 79531249 TI - Laser Precision Microfabrication AU - Sugioka, Koji AU - Meunier, Michel AU - Piqué, Alberto AU - SpringerLink (Online service) PY - 2010 SN - 9783642105234 9783642264733 9783642105241 9783642105227 PB - Berlin Heidelberg Springer Berlin Heidelberg DB - UniCat KW - Optics. Quantum optics KW - Electronics KW - Electrical engineering KW - photonics KW - nanotechniek KW - lasers (technologie) KW - optica UR - https://www.unicat.be/uniCat?func=search&query=sysid:79531249 AB - Miniaturization and high precision are rapidly becoming a requirement for many industrial processes and products. As a result, there is greater interest in the use of laser microfabrication technology to achieve these goals. This book composed of 16 chapters covers all the topics of laser precision processing from fundamental aspects to industrial applications to both inorganic and biological materials. It reviews the sate of the art of research and technological development in the area of laser processing. ER -