TY - BOOK ID - 77906907 TI - Smart mems and sensor systems AU - Gaura, Elena AU - Newman, Robert M PY - 2006 SN - 128186739X 9786611867393 1601198876 1860949207 9781860949203 160119269X 9781601192691 9781601198877 1860944930 9781860944932 9781860949203 9781601192691 9781281867391 6611867392 PB - London Imperial College Press DB - UniCat KW - Microelectromechanical systems. KW - Microelectromechanical systems KW - Smart structures KW - Electrical & Computer Engineering KW - Engineering & Applied Sciences KW - Electrical Engineering KW - Adaptive structures KW - Intelligent structures KW - Structural control (Engineering) KW - MEMS (Microelectromechanical systems) KW - Micro-electro-mechanical systems KW - Micro-machinery KW - Microelectromechanical devices KW - Micromachinery KW - Micromachines KW - Micromechanical devices KW - Micromechanical systems KW - Electromechanical devices KW - Microtechnology KW - Mechatronics KW - Smart structures. UR - https://www.unicat.be/uniCat?func=search&query=sysid:77906907 AB - MEMS have revolutionized the semiconductor industry, with sensors being a particularly buoyant sector. This book presents readers with the means to understand, evaluate, appreciate and participate in the development of the field, from a systems perspective. ER -