TY - BOOK ID - 6835884 TI - Scanning electron microscopy : physics of image formation and microanalysis. PY - 1998 VL - 45 SN - 3540639764 3642083722 3540389679 9783540639763 PB - Berlin Springer DB - UniCat KW - Scanning electron microscopy KW - 543.063 KW - Analytical chemistry--?.063 KW - Scanning electron microscopy. KW - 543.063 Analytical chemistry--?.063 KW - Electron microscopy KW - Spectroscopy. KW - Microscopy. KW - Solid state physics. KW - Surfaces (Physics). KW - Interfaces (Physical sciences). KW - Thin films. KW - Physics. KW - Spectroscopy and Microscopy. KW - Solid State Physics. KW - Surface and Interface Science, Thin Films. KW - Physics, general. KW - Natural philosophy KW - Philosophy, Natural KW - Physical sciences KW - Dynamics KW - Films, Thin KW - Solid film KW - Solid state electronics KW - Solids KW - Surfaces (Technology) KW - Coatings KW - Thick films KW - Surface chemistry KW - Surfaces (Physics) KW - Physics KW - Analysis, Microscopic KW - Light microscopy KW - Micrographic analysis KW - Microscope and microscopy KW - Microscopic analysis KW - Optical microscopy KW - Optics KW - Analysis, Spectrum KW - Spectra KW - Spectrochemical analysis KW - Spectrochemistry KW - Spectrometry KW - Spectroscopy KW - Chemistry, Analytic KW - Interferometry KW - Radiation KW - Wave-motion, Theory of KW - Absorption spectra KW - Light KW - Spectroscope KW - Qualitative KW - Analytical chemistry UR - https://www.unicat.be/uniCat?func=search&query=sysid:6835884 AB - Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interations. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information. ER -