TY - BOOK ID - 67150876 TI - Handbook of sputter deposition technology AU - Adachi, Hideaki AU - Wasa, Kiyotaka AU - Kanno, Isaku AU - Kotera, Hidetoshi PY - 2012 SN - 9781437734836 1437734839 9781437734843 1437734847 1283704781 PB - Waltham, MA William Andrew DB - UniCat KW - Cathode sputtering (Plating process) KW - Thin films. KW - Films, Thin KW - Solid film KW - Solid state electronics KW - Solids KW - Surfaces (Technology) KW - Coatings KW - Thick films KW - Ion plating KW - Metallic films KW - Sputtering (Physics) KW - Vapor-plating UR - https://www.unicat.be/uniCat?func=search&query=sysid:67150876 AB - This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. It forms a bridge between fundamental theory and practical application, giving an insight into innovative new materials, devices and systems. Organized into three parts for ease of use, this Handbook introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and also covers new technology such as nano-functional materials and MEMS. Wide varieti ER -