TY - BOOK ID - 6318351 TI - Sputtering by particle bombardment. 3 : Characteristics of sputtered particles, technical applications AU - Behrisch, Rainer AU - Wittmaack, Klaus PY - 1991 VL - 64 SN - 3540534288 0387534288 3540468811 9780387534282 9783540534280 PB - Berlin Springer DB - UniCat KW - 538.97 KW - Special geometry and interaction with particles and radiation KW - 538.97 Special geometry and interaction with particles and radiation UR - https://www.unicat.be/uniCat?func=search&query=sysid:6318351 AB - ER -