TY - BOOK ID - 5113736 TI - Materials modification by energetic atoms and ions PY - 1992 VL - 268 SN - 1558991638 9781558991637 PB - Pittsburgh (Pa.): Materials research society, DB - UniCat KW - Ion bombardment KW - Plasma etching KW - Semiconductors KW - Thin films KW - Couches minces KW - Congresses KW - Etching KW - Congrès KW - -Plasma etching KW - -Semiconductors KW - -Thin films KW - -538.91 <063> KW - 538.97 <063> KW - Films, Thin KW - Solid film KW - Solid state electronics KW - Solids KW - Surfaces (Technology) KW - Coatings KW - Thick films KW - Crystalline semiconductors KW - Semi-conductors KW - Semiconducting materials KW - Semiconductor devices KW - Crystals KW - Electrical engineering KW - Electronics KW - Dry etching KW - Beams, Ion KW - Bombardment, Ion KW - Impact, Ion KW - Ion beams KW - Ion impact KW - Ionic bombardment KW - Collisions (Nuclear physics) KW - Ions KW - -Congresses KW - Structures, including transitions--Congressen KW - Special geometry and interaction with particles and radiation--Congressen KW - Materials KW - 538.97 <063> Special geometry and interaction with particles and radiation--Congressen KW - 538.91 <063> Structures, including transitions--Congressen KW - Congrè€s KW - 538.91 <063> KW - Etching&delete& KW - Ion bombardment - Congresses KW - Semiconductors - Etching - Congresses KW - Thin films - Congresses KW - Plasma etching - Congresses UR - https://www.unicat.be/uniCat?func=search&query=sysid:5113736 AB - ER -