TY - BOOK ID - 48113176 TI - Flash Lamp Annealing : From Basics to Applications AU - Rebohle, Lars. AU - Prucnal, Slawomir. AU - Reichel, Denise. PY - 2019 SN - 3030232999 3030232980 PB - Cham : Springer International Publishing : Imprint: Springer, DB - UniCat KW - Semiconductors. KW - Optical materials. KW - Electronic materials. KW - Manufactures. KW - Lasers. KW - Photonics. KW - Microwaves. KW - Optical engineering. KW - Nanotechnology. KW - Optical and Electronic Materials. KW - Manufacturing, Machines, Tools, Processes. KW - Optics, Lasers, Photonics, Optical Devices. KW - Microwaves, RF and Optical Engineering. KW - Nanotechnology and Microengineering. KW - Crystalline semiconductors KW - Semi-conductors KW - Semiconducting materials KW - Semiconductor devices KW - Crystals KW - Electrical engineering KW - Electronics KW - Solid state electronics KW - Materials KW - Molecular technology KW - Nanoscale technology KW - High technology KW - Mechanical engineering KW - Hertzian waves KW - Electric waves KW - Electromagnetic waves KW - Geomagnetic micropulsations KW - Radio waves KW - Shortwave radio KW - Electronic materials KW - New optics KW - Optics KW - Light amplification by stimulated emission of radiation KW - Masers, Optical KW - Optical masers KW - Light amplifiers KW - Light sources KW - Optoelectronic devices KW - Nonlinear optics KW - Optical parametric oscillators KW - Manufactured goods KW - Manufactured products KW - Products KW - Products, Manufactured KW - Commercial products KW - Manufacturing industries UR - https://www.unicat.be/uniCat?func=search&query=sysid:48113176 AB - This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reader to properly plan and perform their own thermal processing. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey. Several case studies of simulated temperature profiles in real material systems give the reader the necessary insight into the underlying physics and simulations. This book is a valuable reference work for both novice and advanced users. ER -