TY - JFULL ID - 33211049 TI - Micro and nano engineering. PY - 2018 SN - 25900072 PB - [Amsterdam] : Elsevier B.V., DB - UniCat KW - nanotechnology KW - microelectronics KW - nanolithography KW - nanometrology KW - nanofabrication KW - microdevices KW - Nanotechnology. KW - Microtechnology. KW - Micro-technology KW - Microtechnologies KW - High technology KW - Molecular technology KW - Nanoscale technology KW - Microtechnology KW - Nanotechnology KW - Microtechnologie KW - Nanotechnologie UR - https://www.unicat.be/uniCat?func=search&query=sysid:33211049 AB - ER -